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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for ion energy analysis of plasma processes
Patent number
12,136,542
Issue date
Nov 5, 2024
IMPEDANS LTD
Paul Scullin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for ion energy analysis of plasma processes
Patent number
11,908,668
Issue date
Feb 20, 2024
IMPEDANS LTD
Paul Scullin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensing of plasma process parameters
Patent number
9,263,236
Issue date
Feb 16, 2016
IMPEDANS LTD
Paul Scullin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patents Applications
last 30 patents
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Patent Application
SHIELDED APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES
Publication number
20240177965
Publication date
May 30, 2024
Impedans Ltd
David GAHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR NON-INVASIVE SENSING OF RADIO-FREQUENCY CURRE...
Publication number
20230305045
Publication date
Sep 28, 2023
Impedans Ltd
David GAHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TWO STAGE ION CURRENT MEASUREMENT IN A DEVICE FOR ANALYSIS OF PLASM...
Publication number
20230143487
Publication date
May 11, 2023
Impedans Ltd
David GAHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A CONTROLLER FOR A MATCHING UNIT OF A PLASMA PROCESSING SYSTEM
Publication number
20220404785
Publication date
Dec 22, 2022
Impedans Ltd
David GAHAN
G05 - CONTROLLING REGULATING
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Patent Application
APPARATUS AND METHOD FOR SENSING RF SIGNALS FROM RF PLASMA PROCESSI...
Publication number
20220196558
Publication date
Jun 23, 2022
Impedans Ltd
Michael HOPKINS
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES
Publication number
20220157581
Publication date
May 19, 2022
Impedans Ltd
Paul SCULLIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES
Publication number
20220076933
Publication date
Mar 10, 2022
Impedans Ltd
Paul SCULLIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANALYSING RF SIGNALS FROM A PLASMA SYSTEM
Publication number
20150276833
Publication date
Oct 1, 2015
Impedans Ltd
Paul Scullin
G01 - MEASURING TESTING
Information
Patent Application
SENSING OF PLASMA PROCESS PARAMETERS
Publication number
20130056155
Publication date
Mar 7, 2013
IMPEDANS LTD
Paul Scullin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...