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IMS Ionen Mikrofabrations Systeme Gesellschaft m.b.H.

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  • Vienna, AT
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  • Information Patent Grant

    Particle-beam imaging system
    • Patent number 5,378,917
    • Issue date Jan 3, 1995
    • IMS Ionen Mikrofabrations Systeme Gesellschaft m.b.H.
    • Alfred Chalupka
    • H01 - BASIC ELECTRIC ELEMENTS

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