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IMS Ionen Mikrofabrikations Systeme Gellschaft M.B.H.
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Vienna, AT
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last 30 patents
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Patent Grant
Process for producing a structured mask
Patent number
5,876,880
Issue date
Mar 2, 1999
IMS Ionen Mikrofabrikations Systeme Gellschaft M.B.H.
Herbert Vonach
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY