TREA

IMS IONEN MIKROFABRIKATIONS SYSTEME GESELLSCHAFT MBH, A CORP. OF AUSTRIA

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  • A-1020 WIEN, AT
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Patents Grantslast 30 patents

  • Information Patent Grant

    Ion-optical imaging system
    • Patent number 5,436,460
    • Issue date Jul 25, 1995
    • IMS Ionen Mikrofabrikations Systeme Gesellschaft mbH
    • Gerhard Stengl
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion source
    • Patent number 5,317,161
    • Issue date May 31, 1994
    • IMS Ionen Mikrofabrikations Systeme Gesellschaft mbH
    • Alfred Chalupka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for image alignment in ion lithography
    • Patent number 4,967,088
    • Issue date Oct 30, 1990
    • Oesterreichische Investitionskredit Aktiengesellschaft
    • Gerhard Stengl
    • B82 - NANO-TECHNOLOGY
  • Information Patent Grant

    Apparatus and method for inspecting a mask
    • Patent number 4,958,074
    • Issue date Sep 18, 1990
    • Oesterreichische Investitionskredit Aktiengesellschaft
    • Edward Wolf
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Ion beam apparatus and method of modifying substrate
    • Patent number 4,924,104
    • Issue date May 8, 1990
    • IMS Ionen Mikrofabrikations Systeme Gesellschaft mbH
    • Gerhard Stengl
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Apparatus for demagnification or full-size ion projection lithography
    • Patent number 4,894,549
    • Issue date Jan 16, 1990
    • IMS Ionen Mikrofabrikations Systeme Gesellschaft mbH
    • Gerhard Stengl
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion-projection apparatus
    • Patent number 4,835,392
    • Issue date May 30, 1989
    • IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H.
    • Hans Loschner
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of stabilizing a mask
    • Patent number 4,775,797
    • Issue date Oct 4, 1988
    • IMS Ionen Mikrofabrikations Systeme Gesellschaft mbH
    • Gerhard Stengl
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

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