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  • Hwaseong-Si, Gyeonggi-Do, KR
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  • Information Patent Application

    PROCESS CHAMBER AND SUBSTRATE PROCESSING DEVICE
    • Publication number 20150197851
    • Publication date Jul 16, 2015
    • INOCT CO., LTD
    • Song Keun Yoon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE HEATING DEVICE AND PROCESS CHAMBER
    • Publication number 20150159272
    • Publication date Jun 11, 2015
    • INOCT CO., LTD
    • Song Keun Yoon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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