Institut de Microtechnique de l'Universite de Neuchatel

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Neuchatel, CH

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Actuating and sensing device for scanning probe microscopes
- Patent number 7,051,582
- Issue date May 30, 2006
- Institut de Microtechnique de l'Universite de Neuchatel
- Terunobu Akiyama
- G01 - MEASURING TESTING

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