INTERUNIVERSITAIR MICROELECTRONICKA CENTRUM (IMEC

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LOUVAIN 3030 (BELGIQUE, FR

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Method for sample analysis by sputtering with a particle beam, and...
- Patent number 4,912,325
- Issue date Mar 27, 1990
- CAMECA
- Wielfried Vandervorst
- G01 - MEASURING TESTING

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