Invarium, Inc.

Organization

San Jose, CA, US

Business Address
15768 KAVIN LANE LOS GATOS CA 95030 4083952800
State Location
CA
State of Incorporation

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Calibration on wafer sweet spots
- Patent number 7,444,615
- Issue date Oct 28, 2008
- Invarium, Inc.
- Gokhan Percin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for reticle-wide hierarchy management for represe...
- Patent number 7,401,319
- Issue date Jul 15, 2008
- Invarium, Inc.
- Chi-Song Horng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for real time monitoring and verifying optical proximity cor...
- Patent number 7,392,502
- Issue date Jun 24, 2008
- Invarium, Inc.
- Gökhan Percin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for characterizing an image system in lithogra...
- Patent number 7,379,170
- Issue date May 27, 2008
- Invarium, Inc.
- Hsu-Ting Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for reducing patterning variability in integrated...
- Patent number 7,318,214
- Issue date Jan 8, 2008
- Invarium, Inc.
- Roy V. Prasad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of characterizing flare
- Patent number 7,277,165
- Issue date Oct 2, 2007
- Invarium, Inc.
- Bo Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Correcting design data for manufacture
- Patent number 7,275,225
- Issue date Sep 25, 2007
- Invarium, Inc.
- Vishnu G. Kamat
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for designing manufacturable patterns that accoun...
- Patent number 7,266,800
- Issue date Sep 4, 2007
- Invarium, Inc.
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for correcting position-dependent distortions in patterning...
- Patent number 7,246,343
- Issue date Jul 17, 2007
- Invarium, Inc.
- Devendra Joshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring and verifying stepper illumination
- Patent number 7,224,437
- Issue date May 29, 2007
- Invarium, Inc.
- Gökhan Perçin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Characterizing flare of a projection lens
- Patent number 7,189,481
- Issue date Mar 13, 2007
- Invarium, Inc.
- Bo Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

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Patents Applicationslast 30 patents

Information Patent Application
OPTICAL LITHOGRAPHY CORRECTION PROCESS
- Publication number 20110154281
- Publication date Jun 23, 2011
- Invarium, Inc.
- Franz Xaver Zach
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of compensating photomask data for the effects of etch and l...
- Publication number 20070143733
- Publication date Jun 21, 2007
- Invarium, Inc.
- Franz X. Zach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for real time monitoring and verifying optical proximity cor...
- Publication number 20070006116
- Publication date Jan 4, 2007
- Invarium Inc.
- Gokhan Percin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for verifying and choosing lithography model
- Publication number 20060282814
- Publication date Dec 14, 2006
- Invarium, Inc.
- Gokhan Percin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Calibration on wafer sweet spots
- Publication number 20060266243
- Publication date Nov 30, 2006
- Invarium Inc.
- Gokhan Percin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for measuring and verifying stepper illumination
- Publication number 20060268254
- Publication date Nov 30, 2006
- Invarium, Inc.
- Gokhan Percin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for characterizing an image system in lithogra...
- Publication number 20060251994
- Publication date Nov 9, 2006
- Invarium, Inc.
- Hsu-Ting Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for compensating a lithography projection tool
- Publication number 20060248497
- Publication date Nov 2, 2006
- Invarium, Inc.
- Hsu-Ting Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for photomask design
- Publication number 20060248498
- Publication date Nov 2, 2006
- Invarium, Inc.
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus and method for segmenting edges for optical proximity cor...
- Publication number 20060248496
- Publication date Nov 2, 2006
- Invarium, Inc.
- Abdurrahman Sezginer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for breaking up and merging polygons
- Publication number 20060248499
- Publication date Nov 2, 2006
- Invarium, Inc.
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus of model-based photomask synthesis
- Publication number 20060248495
- Publication date Nov 2, 2006
- Invarium, Inc.
- Abdurrahman Sezginer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical lithography correction process
- Publication number 20060236271
- Publication date Oct 19, 2006
- Invarium, Inc.
- Franz Xaver Zach
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Optical lithography verification process
- Publication number 20060228041
- Publication date Oct 12, 2006
- Invarium, Inc.
- Devendra Joshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for reticle-wide hierarchy management for represe...
- Publication number 20060143589
- Publication date Jun 29, 2006
- Invarium, Inc.
- Chi-Song Horng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and system for semiconductor design hierarchy analysis and t...
- Publication number 20060075371
- Publication date Apr 6, 2006
- Invarium, Inc.
- Vishnu Govind Kamat
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and system for managing design corrections for optical and p...
- Publication number 20060075379
- Publication date Apr 6, 2006
- Invarium, Inc.
- Vishnu Govind Kamat
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for correcting position-dependent distortions in patterning...
- Publication number 20060048091
- Publication date Mar 2, 2006
- Invarium, Inc.
- Devendra Joshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for designing manufacturable patterns that accoun...
- Publication number 20050273753
- Publication date Dec 8, 2005
- Invarium, Inc.
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING

Invarium, Inc.

Organization

Business Address

State Location

State of Incorporation

Patents Grantslast 30 patents

Calibration on wafer sweet spots

Method and system for reticle-wide hierarchy management for represe...

Method for real time monitoring and verifying optical proximity cor...

Apparatus and method for characterizing an image system in lithogra...

System and method for reducing patterning variability in integrated...

Method of characterizing flare

Correcting design data for manufacture

Method and system for designing manufacturable patterns that accoun...

Method for correcting position-dependent distortions in patterning...

Method for measuring and verifying stepper illumination

Characterizing flare of a projection lens

Patents Applicationslast 30 patents

OPTICAL LITHOGRAPHY CORRECTION PROCESS

Method of compensating photomask data for the effects of etch and l...

Method for real time monitoring and verifying optical proximity cor...

Method for verifying and choosing lithography model

Calibration on wafer sweet spots

Method for measuring and verifying stepper illumination

Apparatus and method for characterizing an image system in lithogra...

Apparatus and method for compensating a lithography projection tool

Apparatus and method for photomask design

Apparatus and method for segmenting edges for optical proximity cor...

Apparatus and method for breaking up and merging polygons

Method and apparatus of model-based photomask synthesis

Optical lithography correction process

Optical lithography verification process

Method and system for reticle-wide hierarchy management for represe...

Method and system for semiconductor design hierarchy analysis and t...

Method and system for managing design corrections for optical and p...

Method for correcting position-dependent distortions in patterning...

Method and system for designing manufacturable patterns that accoun...