JSR Micro, Inc.

Organization

  • Sunnyvale, CA, US

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  • Information Patent Grant

    Self-topcoating photoresist for photolithography

    • Patent number 7,951,524
    • Issue date May 31, 2011
    • International Business Machines Corporation
    • Robert Allen
    • C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

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