-
-
-
-
-
Plasma process apparatus
-
Patent number 6,719,875
-
Issue date Apr 13, 2004
-
Kabushiki Kaisha UltraClean Technology Research Institute
-
Tadahiro Ohmi
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
Gas recovering apparatus
-
Patent number 6,436,353
-
Issue date Aug 20, 2002
-
Kabushiki Kaisha UltraClean Technology Research Institute
-
Tadahiro Ohmi
-
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
-
Cleaning method
-
Patent number 6,348,157
-
Issue date Feb 19, 2002
-
Kabushiki Kaisha UltraClean Technology Research Institute
-
Tadahiro Ohmi
-
B08 - CLEANING
-
-
-
Semiconductor arithmetic circuit
-
Patent number 6,199,092
-
Issue date Mar 6, 2001
-
Kabushiki Kaisha UltraClean Technology Research Institute
-
Tadashi Shibata
-
G06 - COMPUTING CALCULATING COUNTING
-
-
-
-
Abrasive composition
-
Patent number 5,895,509
-
Issue date Apr 20, 1999
-
Kabushiki Kaisha Ultraclean Technology Research Institute
-
Tadahiro Ohmi
-
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...