KLA-Tencor Technologies Corporation

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for inspection of wafers and reticles using des...
- Patent number 11,348,222
- Issue date May 31, 2022
- KLA-Tencor Technologies Corp.
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for inspection of a specimen
- Patent number 11,204,330
- Issue date Dec 21, 2021
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for inspection of wafers and reticles using des...
- Patent number 10,713,771
- Issue date Jul 14, 2020
- KLA-Tencor Technologies Corp.
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for utilizing design data in combination with i...
- Patent number 9,401,014
- Issue date Jul 26, 2016
- KLA-Tencor Technologies Corp.
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods for improved monitor and control of lithography processes
- Patent number 9,188,974
- Issue date Nov 17, 2015
- KLA-Tencor Technologies Corp.
- Chris Mack
- G05 - CONTROLLING REGULATING
Information Patent Grant
Systems and methods for inspection of a specimen
- Patent number 9,068,917
- Issue date Jun 30, 2015
- KLA-Tencor Technologies Corp.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
DC high-voltage super-radiant free-electron based EUV source
- Patent number 9,053,833
- Issue date Jun 9, 2015
- KLA-Tencor Technologies, Corporation
- Tomas Plettner
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical imaging system with catoptric objective; broadband objectiv...
- Patent number 9,052,494
- Issue date Jun 9, 2015
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods for performing one or more defect-rela...
- Patent number 9,037,280
- Issue date May 19, 2015
- KLA-Tencor Technologies Corp.
- Mark Dishner
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and systems for inspection of wafers and reticles using des...
- Patent number 9,002,497
- Issue date Apr 7, 2015
- KLA-Tencor Technologies Corp.
- William Volk
- G01 - MEASURING TESTING
Information Patent Grant
Dual scanning stage
- Patent number 8,924,014
- Issue date Dec 30, 2014
- KLA-Tencor Technologies, Inc.
- Aviv Balan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Methods and systems for utilizing design data in combination with i...
- Patent number 8,923,600
- Issue date Dec 30, 2014
- KLA-Tencor Technologies Corp.
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for monitoring a parameter of a measurement dev...
- Patent number 8,831,767
- Issue date Sep 9, 2014
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Site based quantification of substrate topography and its relation...
- Patent number 8,768,665
- Issue date Jul 1, 2014
- KLA-Tencor Technologies Corporation
- Sathish Veeraraghavan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for measuring a characteristic of a substrate o...
- Patent number 8,765,496
- Issue date Jul 1, 2014
- KLA-Tencor Technologies Corp.
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device property extraction, generation, visualization...
- Patent number 8,611,639
- Issue date Dec 17, 2013
- KLA-Tencor Technologies Corp.
- Ashok Kulkarni
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for inspecting specimens including specimens th...
- Patent number 8,582,094
- Issue date Nov 12, 2013
- KLA-Tencor Technologies Corp.
- David Shortt
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods and systems for classifying defects on...
- Patent number 8,532,949
- Issue date Sep 10, 2013
- KLA-Tencor Technologies Corp.
- Cho Huak Teh
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 8,502,979
- Issue date Aug 6, 2013
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a characteristic of a wafer
- Patent number 8,422,010
- Issue date Apr 16, 2013
- KLA-Tencor Technologies Corp.
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Z-stage with dynamically driven stage mirror and chuck assembly
- Patent number 8,390,789
- Issue date Mar 5, 2013
- KLA-Tencor Technologies Corporation
- Salam Harb
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and systems for inspection of a specimen using different in...
- Patent number 8,384,887
- Issue date Feb 26, 2013
- KLA-Tencor Technologies Corp.
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Systems configured to generate output corresponding to defects on a...
- Patent number 8,355,140
- Issue date Jan 15, 2013
- KLA-Tencor Technologies Corp.
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Overlay marks, methods of overlay mark design and methods of overla...
- Patent number 8,330,281
- Issue date Dec 11, 2012
- KLA-Tencor Technologies Corporation
- Mark Ghinovker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Enclosure for controlling the environment of optical crystals
- Patent number 8,298,335
- Issue date Oct 30, 2012
- KLA-Tencor Technologies Corporation
- J. Joseph Armstrong
- G02 - OPTICS
Information Patent Grant
Methods and systems for determining a characteristic of a wafer
- Patent number 8,284,394
- Issue date Oct 9, 2012
- KLA-Tencor Technologies Corp.
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Methods for accurate identification of an edge of a care area for a...
- Patent number 8,213,705
- Issue date Jul 3, 2012
- KLA-Tencor Technologies Corp.
- Chien-Huei (Adam) Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 8,179,530
- Issue date May 15, 2012
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for providing illumination of a specimen for in...
- Patent number 8,148,900
- Issue date Apr 3, 2012
- KLA-Tencor Technologies Corp.
- Greg Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Methods for simulating reticle layout data, inspecting reticle layo...
- Patent number 8,151,220
- Issue date Apr 3, 2012
- KLA-Tencor Technologies Corp.
- Carl Hess
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...
- Publication number 20200074619
- Publication date Mar 5, 2020
- KLA-Tencor Technologies Corporation
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...
- Publication number 20180247403
- Publication date Aug 30, 2018
- KLA-Tencor Technologies Corporation
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Inspection of Wafers and Reticles Using Des...
- Publication number 20150178914
- Publication date Jun 25, 2015
- KLA-Tencor Technologies Corporation
- Paul Frank Marella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Utilizing Design Data in Combination with I...
- Publication number 20150154746
- Publication date Jun 4, 2015
- KLA-Tencor Technologies Corporation
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and Systems for Determining a Critical Dimension and Overla...
- Publication number 20130314710
- Publication date Nov 28, 2013
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR USING SUBSTRATE GEOMETRY TO DETERMINE OPTIMUM...
- Publication number 20130310966
- Publication date Nov 21, 2013
- KLA-Tencor Technologies Corporation
- Craig W. MacNaughton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL MULTI-LAYER OVERLAY MARKS, APPARATUS, AND METHODS
- Publication number 20130163852
- Publication date Jun 27, 2013
- KLA-Tencor Technologies Corporation
- Mark Ghinovker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...
- Publication number 20130039460
- Publication date Feb 14, 2013
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Methods and Systems for Determining a Characteristic of a Wafer
- Publication number 20130035877
- Publication date Feb 7, 2013
- KLA-Tencor Technologies Corporation
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETERMINING OVERLAY OF STRUCTURES HAVING...
- Publication number 20120153281
- Publication date Jun 21, 2012
- KLA-Tencor Technologies Corporation
- Mark Ghinovker
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...
- Publication number 20110313558
- Publication date Dec 22, 2011
- KLA-Tencor Technologies Corporation
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...
- Publication number 20110286656
- Publication date Nov 24, 2011
- KLA-Tencor Technologies Corporation
- Ashok Kulkarni
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION SYSTEMS AND METHODS FOR DETECTING DEFECTS ON EXTREME UL...
- Publication number 20110181868
- Publication date Jul 28, 2011
- KLA-Tencor Technologies Corporation
- Stanley E. Stokowski
- B82 - NANO-TECHNOLOGY
Information Patent Application
Systems Configured to Generate Output Corresponding to Defects on a...
- Publication number 20110181891
- Publication date Jul 28, 2011
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Application
SITE BASED QUANTIFICATION OF SUBSTRATE TOPOGRAPHY AND ITS RELATION...
- Publication number 20110172982
- Publication date Jul 14, 2011
- KLA-Tencor Technologies Corp.
- Sathish Veeraraghavan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS FOR ACCURATE IDENTIFICATION OF AN EDGE OF A CARE AREA FOR A...
- Publication number 20110142327
- Publication date Jun 16, 2011
- KLA-Tencor Technologies Corporation
- Chien-Huei (Adam) Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Shielding, Particulate Reducing High Vacuum Components
- Publication number 20110142382
- Publication date Jun 16, 2011
- KLA-Tencor Technologies Corporation
- Mohammed Tahmassebpur
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELA...
- Publication number 20100328670
- Publication date Dec 30, 2010
- KLA-Tencor Technologies Corporation
- Lawrence D. Rotter
- G01 - MEASURING TESTING
Information Patent Application
Method for Measuring Thermo-Optically Induced Material Phase-Change...
- Publication number 20100318212
- Publication date Dec 16, 2010
- KLA-Tencor Technologies Corporation
- Carlos L. Ygartua
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...
- Publication number 20100271621
- Publication date Oct 28, 2010
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR INSPECTION OF A SPECIMEN USING DIFFERENT IN...
- Publication number 20100238433
- Publication date Sep 23, 2010
- KLA-Tencor Technologies Corporation
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS FOR DETECTING AND/OR SORTING DEFECTS I...
- Publication number 20100226562
- Publication date Sep 9, 2010
- KLA-Tencor Technologies Corporation
- Kenong Wu
- G01 - MEASURING TESTING
Information Patent Application
SPECTROSCOPIC SCATTEROMETER SYSTEM
- Publication number 20100165340
- Publication date Jul 1, 2010
- KLA-Tencor Technologies Corporation
- Yiping Xu
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...
- Publication number 20100119144
- Publication date May 13, 2010
- KLA-Tencor Technologies Corporation
- Ashok Kulkarni
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20100091284
- Publication date Apr 15, 2010
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO...
- Publication number 20100073688
- Publication date Mar 25, 2010
- KLA-Tencor Technologies Corporation
- Ibrahim Abdulhalim
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and Methods for Determining Overlay and Uses of Same
- Publication number 20100005442
- Publication date Jan 7, 2010
- KLA-Tencor Technologies Corporation
- Mark Ghinovker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...
- Publication number 20090297019
- Publication date Dec 3, 2009
- KLA-Tencor Technologies Corporation
- Khurram Zafar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR BINNING DEFECTS DETECTED ON A SPECIMEN
- Publication number 20090290784
- Publication date Nov 26, 2009
- KLA-Tencor Technologies Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20090284744
- Publication date Nov 19, 2009
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING

Trademarklast 30 trademarks

Information Trademark
77611414 - RPI
- Serial number 77611414
- Filing date Nov 10, 2008
- KLA-Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77611443 - API
- Serial number 77611443
- Registration number 3822652
- Filing date Nov 10, 2008
- KLA-Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77611427 - WPI
- Serial number 77611427
- Registration number 3807865
- Filing date Nov 10, 2008
- KLA-Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77327614 - ALERIS
- Serial number 77327614
- Registration number 3705933
- Filing date Nov 12, 2007
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77193599 - ULTRASHARP
- Serial number 77193599
- Registration number 4198680
- Filing date May 30, 2007
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77075562 - AIM
- Serial number 77075562
- Registration number 3747142
- Filing date Jan 3, 2007
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78934891 - VISEDGE
- Serial number 78934891
- Registration number 3244898
- Filing date Jul 21, 2006
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78699748 - CANDELA
- Serial number 78699748
- Registration number 3617569
- Filing date Aug 24, 2005
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78499439 - EDR
- Serial number 78499439
- Registration number 3412683
- Filing date Oct 13, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78437357 - ARCHER ANALYZER
- Serial number 78437357
- Registration number 3330607
- Filing date Jun 17, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78429779 - K-T ANALYZER
- Serial number 78429779
- Registration number 3249952
- Filing date Jun 3, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78429772 - SCD ANALYZER
- Serial number 78429772
- Filing date Jun 3, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78429770 - ECD ANALYZER
- Serial number 78429770
- Filing date Jun 3, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78425670 - RICO
- Serial number 78425670
- Registration number 3525653
- Filing date May 26, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78405714 - DESIGNSCAN
- Serial number 78405714
- Filing date Apr 21, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78401230 - K-T CERTIFIED
- Serial number 78401230
- Registration number 3373776
- Filing date Apr 13, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78390308 - SCOL
- Serial number 78390308
- Registration number 3360383
- Filing date Mar 24, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78354882 - AF-LM
- Serial number 78354882
- Filing date Jan 21, 2004
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78345239 - INSPECTSMART
- Serial number 78345239
- Filing date Dec 23, 2003
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78345248 - REVIEWSMART
- Serial number 78345248
- Registration number 3363097
- Filing date Dec 23, 2003
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78345243 - DESIGNSMART
- Serial number 78345243
- Filing date Dec 23, 2003
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78345251 - LITHOSMART
- Serial number 78345251
- Filing date Dec 23, 2003
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78345254 - SMART INSPECTION
- Serial number 78345254
- Filing date Dec 23, 2003
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78279191 - METRIX 100
- Serial number 78279191
- Registration number 3006457
- Filing date Jul 25, 2003
- KLA-Tencor Technologies Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
78092688 - IPARTNER
- Serial number 78092688
- Registration number 2787542
- Filing date Nov 9, 2001
- KLA-Tencor Corporation
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
76315196 - MICROLOOP
- Serial number 76315196
- Registration number 3046532
- Filing date Sep 19, 2001
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76315077 - ECD-1
- Serial number 76315077
- Registration number 2821540
- Filing date Sep 19, 2001
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76315081 - ED0
- Serial number 76315081
- Registration number 2765142
- Filing date Sep 19, 2001
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76315078 - µLOOP
- Serial number 76315078
- Registration number 3184153
- Filing date Sep 19, 2001
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
76284101 - ARCHER 10
- Serial number 76284101
- Registration number 2800869
- Filing date Jul 11, 2001
- KLA-Tencor Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

KLA-Tencor Technologies Corporation

Organization

Patents Grantslast 30 patents

Methods and systems for inspection of wafers and reticles using des...

Systems and methods for inspection of a specimen

Methods and systems for inspection of wafers and reticles using des...

Methods and systems for utilizing design data in combination with i...

Methods for improved monitor and control of lithography processes

Systems and methods for inspection of a specimen

DC high-voltage super-radiant free-electron based EUV source

Optical imaging system with catoptric objective; broadband objectiv...

Computer-implemented methods for performing one or more defect-rela...

Methods and systems for inspection of wafers and reticles using des...

Dual scanning stage

Methods and systems for utilizing design data in combination with i...

Methods and systems for monitoring a parameter of a measurement dev...

Site based quantification of substrate topography and its relation...

Methods and systems for measuring a characteristic of a substrate o...

Semiconductor device property extraction, generation, visualization...

Systems and methods for inspecting specimens including specimens th...

Computer-implemented methods and systems for classifying defects on...

Methods and systems for determining a critical dimension and overla...

Methods and systems for determining a characteristic of a wafer

Z-stage with dynamically driven stage mirror and chuck assembly

Methods and systems for inspection of a specimen using different in...

Systems configured to generate output corresponding to defects on a...

Overlay marks, methods of overlay mark design and methods of overla...

Enclosure for controlling the environment of optical crystals

Methods and systems for determining a characteristic of a wafer

Methods for accurate identification of an edge of a care area for a...

Methods and systems for determining a critical dimension and overla...

Methods and systems for providing illumination of a specimen for in...

Methods for simulating reticle layout data, inspecting reticle layo...

Patents Applicationslast 30 patents

METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...

METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DES...

Methods and Systems for Inspection of Wafers and Reticles Using Des...

Methods and Systems for Utilizing Design Data in Combination with I...

Methods and Systems for Determining a Critical Dimension and Overla...

METHOD AND DEVICE FOR USING SUBSTRATE GEOMETRY TO DETERMINE OPTIMUM...

ROTATIONAL MULTI-LAYER OVERLAY MARKS, APPARATUS, AND METHODS

METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...

Methods and Systems for Determining a Characteristic of a Wafer

APPARATUS AND METHODS FOR DETERMINING OVERLAY OF STRUCTURES HAVING...

METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...

METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH I...

INSPECTION SYSTEMS AND METHODS FOR DETECTING DEFECTS ON EXTREME UL...

Systems Configured to Generate Output Corresponding to Defects on a...

SITE BASED QUANTIFICATION OF SUBSTRATE TOPOGRAPHY AND ITS RELATION...

METHODS FOR ACCURATE IDENTIFICATION OF AN EDGE OF A CARE AREA FOR A...

Shielding, Particulate Reducing High Vacuum Components

SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELA...

Method for Measuring Thermo-Optically Induced Material Phase-Change...

METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...

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