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Kokusai Gljutsu Kaihatsu Co., Ltd.
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Indirect temperature-measurement of films formed on semiconductor w...
Patent number
5,249,142
Issue date
Sep 28, 1993
Tokyo Electron Kyushu Limited
Eiichi Shirakawa
G01 - MEASURING TESTING