Koo; Ann F.

Organization

Los Altos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for measuring surface topography
- Patent number 5,917,191
- Issue date Jun 29, 1999
- Koo; Ann F.
- David Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring surface topography
- Patent number 5,708,279
- Issue date Jan 13, 1998
- Koo; Ann F.
- David Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring the curvature of wafers with bea...
- Patent number 5,696,383
- Issue date Dec 9, 1997
- Koo; Ann F.
- David Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Beam spot position detector having a detector moving mechanism
- Patent number 5,532,499
- Issue date Jul 2, 1996
- Koo; Ann F.
- David Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring the curvature of wafers with a l...
- Patent number 5,523,582
- Issue date Jun 4, 1996
- Koo; Ann F.
- David Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for finding wafer index marks and centers
- Patent number 5,452,078
- Issue date Sep 19, 1995
- Koo; Ann F.
- David Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring stress in a film applied to surf...
- Patent number 5,369,286
- Issue date Nov 29, 1994
- Koo; Ann F.
- David Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring workpiece surface topography
- Patent number 5,270,560
- Issue date Dec 14, 1993
- Koo; Ann F.
- David Cheng
- G01 - MEASURING TESTING

Koo; Ann F.

Organization

Patents Grantslast 30 patents

Apparatus for measuring surface topography

Method and apparatus for measuring surface topography

Method and apparatus for measuring the curvature of wafers with bea...

Beam spot position detector having a detector moving mechanism

Method and apparatus for measuring the curvature of wafers with a l...

Method and apparatus for finding wafer index marks and centers

Method and apparatus for measuring stress in a film applied to surf...

Method and apparatus for measuring workpiece surface topography