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Chungcheongnam-do, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Cluster apparatus for treating substrate
Patent number
10,006,146
Issue date
Jun 26, 2018
Kookje Electric Korea Co., Ltd.
Yong Sung Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate susceptor and deposition apparatus having same
Patent number
9,567,673
Issue date
Feb 14, 2017
Kookje Electric Korea Co., Ltd.
Yong Sung Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming an epitaxial layer on a substrate, and apparatus...
Patent number
9,269,578
Issue date
Feb 23, 2016
Samsung Electronics Co., Ltd.
Sung-Ho Kang
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
HEATER MEMBER AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
Publication number
20160230282
Publication date
Aug 11, 2016
KOOKJE ELECTRIC KOREA CO., LTD.
Hong Joo BANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING AN EPITAXIAL LAYER ON A SUBSTRATE, AND APPARATUS...
Publication number
20160126096
Publication date
May 5, 2016
Kookje Electric Korea Co., Ltd.
Sung-Ho KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS PHASE ETCHING APPARATUS
Publication number
20150364348
Publication date
Dec 17, 2015
KOOKJE ELECTRIC KOREA CO., LTD.
Young-Woo PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INJECTION MEMBER IN FABRICATION OF SEMICONDUCTOR DEVICE AND SUBSTRA...
Publication number
20140224177
Publication date
Aug 14, 2014
KOOKJE ELECTRIC KOREA CO., LTD.
Yong Sung Park
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD OF FORMING AN EPITAXIAL LAYER ON A SUBSTRATE, AND APPARATUS...
Publication number
20140193967
Publication date
Jul 10, 2014
Kookje Electric Korea Co., Ltd.
Sung-Ho KANG
C30 - CRYSTAL GROWTH
Information
Patent Application
INJECTION MEMBER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA...
Publication number
20130276983
Publication date
Oct 24, 2013
Hitachi Kokusai Electric Inc.
Yong Sung Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE SUSCEPTOR AND DEPOSITION APPARATUS HAVING SAME
Publication number
20130118407
Publication date
May 16, 2013
KOOKJE ELECTRIC KOREA CO., LTD.
Yong Sung Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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