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Nishiwaki, JP
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last 30 patents
Information
Patent Grant
Method and apparatus for classifying a defect on a semiconductor wafer
Patent number
5,943,437
Issue date
Aug 24, 1999
Kabushiki Kaisha Kobe Seiko Sho
Shingo Sumie
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
High current ion implanter and method of ion implant by the implanter
Patent number
5,864,143
Issue date
Jan 26, 1999
KTI Semiconductor Ltd.
Hirokazu Ueda
H01 - BASIC ELECTRIC ELEMENTS
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