Lam Research Corporation

Organization

Fremont, CA, US

Ticker Symbols

NASDAQ:LRCX

SPECIAL INDUSTRY MACHINERY, NEC
Business Address
4650 CUSHING BLVD FREMONT CA 94538 5106590200
Mailing Address
4650 CUSHING PARKWAY FREMONT CA 94538
State Location
CA
State of Incorporation
DE

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Low temperature manifold assembly for substrate processing systems
- Patent number 12,224,161
- Issue date Feb 11, 2025
- Lam Research Corporation
- Gabriel De Jesus Soto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power cable for heated components in RF environment
- Patent number 12,217,944
- Issue date Feb 4, 2025
- Lam Research Corporation
- Seyed Jafar Jafarian-Tehrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal thermal profile tuning using multiple heated zones and the...
- Patent number 12,215,420
- Issue date Feb 4, 2025
- Lam Research Corporation
- Gary B. Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for pulse width modulated dose control
- Patent number 12,215,421
- Issue date Feb 4, 2025
- Lam Research Corporation
- Mariusch Gregor
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Sorption chamber walls for semiconductor equipment
- Patent number 12,217,945
- Issue date Feb 4, 2025
- Lam Research Corporation
- Hossein Sadeghi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing a wafer, and method of controlling such an...
- Patent number 12,217,980
- Issue date Feb 4, 2025
- Lam Research AG
- Daniel Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Differential-pressure-based flow meters
- Patent number 12,215,989
- Issue date Feb 4, 2025
- Lam Research Corporation
- John Folden Stumpf
- G01 - MEASURING TESTING
Information Patent Grant
Method for etching features using a targeted deposition for selecti...
- Patent number 12,217,955
- Issue date Feb 4, 2025
- Lam Research Corporation
- Wenchi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF tuning systems including tuning circuits having impedances for s...
- Patent number 12,217,939
- Issue date Feb 4, 2025
- Lam Research Corporation
- David French
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sensor data compression in a plasma tool
- Patent number 12,217,940
- Issue date Feb 4, 2025
- Lam Research Corporation
- John Valcore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-state pulsing for achieving a balance between bow control and...
- Patent number 12,217,972
- Issue date Feb 4, 2025
- Lam Research Corporation
- Nikhil Dole
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement correction in indexed multi-station processing cham...
- Patent number 12,217,985
- Issue date Feb 4, 2025
- Lam Research Corporation
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling of air actuated valve using actuating air
- Patent number 12,215,804
- Issue date Feb 4, 2025
- Lam Research Corporation
- Adriana Vintila
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Systems and methods for metastable activated radical selective stri...
- Patent number 12,211,709
- Issue date Jan 28, 2025
- Lam Research Corporation
- Dengliang Yang
- B08 - CLEANING
Information Patent Grant
Dry development of resists
- Patent number 12,211,691
- Issue date Jan 28, 2025
- Lam Research Corporation
- Boris Volosskiy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control of a multi-zone pedestal
- Patent number 12,209,312
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Joining techniques for composite ceramic bodies
- Patent number 12,211,685
- Issue date Jan 28, 2025
- Lam Research Corporation
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for anisotropic pattern etching and treatment
- Patent number 12,205,793
- Issue date Jan 21, 2025
- Lam Research Corporation
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal deposition
- Patent number 12,203,168
- Issue date Jan 21, 2025
- Lam Research Corporation
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency power generator having multiple output ports
- Patent number 12,205,796
- Issue date Jan 21, 2025
- Lam Research Corporation
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminated aerosol deposition coating for aluminum components for pl...
- Patent number 12,198,902
- Issue date Jan 14, 2025
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery head for preventing stiction of high aspect ratio st...
- Patent number 12,198,945
- Issue date Jan 14, 2025
- Lam Research AG
- Bhaskar Bandarapu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact high density plasma source
- Patent number 12,198,896
- Issue date Jan 14, 2025
- Lam Research Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal for a substrate processing system
- Patent number D1057675
- Issue date Jan 14, 2025
- Lam Research Corporation
- Gary B. Lind
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Collaborative robot system on a mobile cart with a chamber docking...
- Patent number 12,186,887
- Issue date Jan 7, 2025
- Lam Research Corporation
- Vitali Brand
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
In-situ sensor-fusion with artificial intelligence
- Patent number 12,189,369
- Issue date Jan 7, 2025
- Lam Research Corporation
- Yu Ding
- G05 - CONTROLLING REGULATING
Information Patent Grant
Use of vacuum during transfer of substrates
- Patent number 12,186,851
- Issue date Jan 7, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck with spatially tunable RF coupling to a wafer
- Patent number 12,191,122
- Issue date Jan 7, 2025
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removing metal contamination from surfaces of a processing chamber
- Patent number 12,191,125
- Issue date Jan 7, 2025
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER
- Publication number 20250051921
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Alon Ganany
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING TOOL WITH HIGH-SPEED MATCH NETWORK IMPEDANCE S...
- Publication number 20250054729
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Shen PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALD PULSE SEQUENCE ENGINEERING FOR IMPROVED CONFORMALITY FOR LOW TE...
- Publication number 20250054751
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON MASK DEPOSITION
- Publication number 20250054760
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Daniela ANJOS RIGSBY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY
- Publication number 20250054788
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD FACEPLATE CONFIGURATIONS
- Publication number 20250054734
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Bin LUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...
- Publication number 20250054752
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dustin Zachary Austin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REDUCING VARIATIONS IN MASK TOPOGRAPHY
- Publication number 20250054769
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Hsu-Cheng HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVELOPMENT OF HYBRID ORGANOTIN OXIDE PHOTORESISTS
- Publication number 20250053084
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Eric Calvin Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...
- Publication number 20250054778
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Anthony DE LA LLERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AQUEOUS ACID DEVELOPMENT OR TREATMENT OF ORGANOMETALLIC PHOTORESIST
- Publication number 20250053092
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Nizan Kenane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LARGE GRAIN TUNGSTEN GROWTH IN FEATURES
- Publication number 20250051908
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Kevin Qiwen CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE COATINGS ON PARTS FOR GALLING PREVENTION AND HIGH-TEMPER...
- Publication number 20250052272
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Rohit Ode
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Extracting Process Control Information from...
- Publication number 20250054730
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS
- Publication number 20250054738
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dan MAROHL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A WAFER CHUCK ASSEMBLY WITH THERMAL INSULATION FOR RF CONNECTIONS
- Publication number 20250054736
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Patrick G. BREILING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CROSS FLOW CONDUIT FOR FOAMING PREVENTION IN HIGH CONVECTION PLATIN...
- Publication number 20250051953
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CONFORMAL DEPOSITION OF SILICON NITRIDE
- Publication number 20250054747
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODEL-BASED SCHEDULING FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20250044775
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Raymond CHAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...
- Publication number 20250043425
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECT-PICK ROBOT FOR MULTI-STATION SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20250046643
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD AND APPARATUS FOR ENHANCING ION ENERGY AND REDUCING ION EN...
- Publication number 20250046572
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Juline Shoeb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL POLISHING APPARATUS
- Publication number 20250041990
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Robert McKinney
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR PROVIDING DOPED SILICON USING A DIFFUSION BARRIER LAYER
- Publication number 20250046613
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Purushottam KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...
- Publication number 20250046644
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Andrew Borth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE SYSTEMS FOR BALANCING GAS FLOW TO MULTIPLE STATIONS OF A SUBS...
- Publication number 20250043421
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Michael Philip ROBERTS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...
- Publication number 20250038003
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- David Joseph Mandia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF HIGH COMPRESSIVE STRESS THERMALLY STABLE NITRIDE FILM
- Publication number 20250037992
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- Soumana HAMMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING TOOL WITH RAPID AND SELECTIVE CONTROL OF PARTI...
- Publication number 20250038011
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- Richard H. GOULD
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
99035656 - PRESTIS
- Serial number 99035656
- Filing date Feb 10, 2025
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
99023170 - FABTEX
- Serial number 99023170
- Filing date Jan 30, 2025
- LAM RESEARCH CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
98846897 - DEXTRO
- Serial number 98846897
- Filing date Nov 11, 2024
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
98689861 - ARTEMIS
- Serial number 98689861
- Filing date Aug 8, 2024
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
98689843 - CRYO 3.0
- Serial number 98689843
- Filing date Aug 8, 2024
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
98554818 - SELITANE
- Serial number 98554818
- Filing date May 16, 2024
- LAM RESEARCH CORPORATION
- 1 - Chemicals used in industry, science and photography, as well as in agriculture, horticulture and forestry
Information Trademark
98467965 - LAM CRYO
- Serial number 98467965
- Filing date Mar 26, 2024
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
98376855 - GALILEO
- Serial number 98376855
- Filing date Jan 26, 2024
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
98150644 - TREOS
- Serial number 98150644
- Filing date Aug 25, 2023
- LAM RESEARCH CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
98150653 - TREOS
- Serial number 98150653
- Filing date Aug 25, 2023
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
98019988 - SEMIVERSE
- Serial number 98019988
- Filing date May 30, 2023
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
98020007 - SEMIVERSE
- Serial number 98020007
- Filing date May 30, 2023
- LAM RESEARCH CORPORATION
- 38 - Telecommunications
Information Trademark
98020013 - SEMIVERSE
- Serial number 98020013
- Filing date May 30, 2023
- LAM RESEARCH CORPORATION
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
98020003 - SEMIVERSE
- Serial number 98020003
- Filing date May 30, 2023
- LAM RESEARCH CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
98975597 - SEMIVERSE
- Serial number 98975597
- Filing date May 30, 2023
- LAM RESEARCH CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97777662 - SCANRAMICS
- Serial number 97777662
- Filing date Feb 2, 2023
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
97721066 - PULSUS
- Serial number 97721066
- Registration number 7376003
- Filing date Dec 16, 2022
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
97716222 - CERASCAN
- Serial number 97716222
- Filing date Dec 13, 2022
- LAM RESEARCH CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97716213 - CERASCAN
- Serial number 97716213
- Filing date Dec 13, 2022
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
97519870 - PUREX
- Serial number 97519870
- Registration number 7311626
- Filing date Jul 26, 2022
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
97416571 - SEZ
- Serial number 97416571
- Filing date May 18, 2022
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
97398740 - FROST
- Serial number 97398740
- Filing date May 6, 2022
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
97398730 - FROSTFILL
- Serial number 97398730
- Filing date May 6, 2022
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
97347125 - SPECIALTY TECHNOLOGIES
- Serial number 97347125
- Filing date Apr 5, 2022
- LAM RESEARCH CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97139507 - ARCH
- Serial number 97139507
- Registration number 7032498
- Filing date Nov 23, 2021
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
90845401 - EQUIPMENT INTELLIGENCE
- Serial number 90845401
- Filing date Jul 23, 2021
- LAM RESEARCH CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90836732 - SMALLER FASTER SMARTER
- Serial number 90836732
- Filing date Jul 19, 2021
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
90836758 - THINK BIG SCALE SMALL
- Serial number 90836758
- Filing date Jul 19, 2021
- LAM RESEARCH CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90836709 - THINK BIG SCALE SMALL
- Serial number 90836709
- Filing date Jul 19, 2021
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools
Information Trademark
90836719 - SMALLER FASTER SMARTER PROVEN
- Serial number 90836719
- Filing date Jul 19, 2021
- LAM RESEARCH CORPORATION
- 7 - Machines and machine tools

Lam Research Corporation

Organization

Ticker Symbols

Business Address

Mailing Address

State Location

State of Incorporation

Patents Grantslast 30 patents

Low temperature manifold assembly for substrate processing systems

High power cable for heated components in RF environment

Pedestal thermal profile tuning using multiple heated zones and the...

Systems and methods for pulse width modulated dose control

Sorption chamber walls for semiconductor equipment

Apparatus for processing a wafer, and method of controlling such an...

Differential-pressure-based flow meters

Method for etching features using a targeted deposition for selecti...

RF tuning systems including tuning circuits having impedances for s...

Sensor data compression in a plasma tool

Multi-state pulsing for achieving a balance between bow control and...

Wafer placement correction in indexed multi-station processing cham...

Cooling of air actuated valve using actuating air

Systems and methods for metastable activated radical selective stri...

Dry development of resists

Concentration control using a bubbler

Temperature control of a multi-zone pedestal

Joining techniques for composite ceramic bodies

Method and apparatus for anisotropic pattern etching and treatment

Metal deposition

Radio frequency power generator having multiple output ports

Laminated aerosol deposition coating for aluminum components for pl...

Vapor delivery head for preventing stiction of high aspect ratio st...

Compact high density plasma source

Pedestal for a substrate processing system

Collaborative robot system on a mobile cart with a chamber docking...

In-situ sensor-fusion with artificial intelligence

Use of vacuum during transfer of substrates

Electrostatic chuck with spatially tunable RF coupling to a wafer

Removing metal contamination from surfaces of a processing chamber

Patents Applicationslast 30 patents

MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER

SUBSTRATE PROCESSING TOOL WITH HIGH-SPEED MATCH NETWORK IMPEDANCE S...

ALD PULSE SEQUENCE ENGINEERING FOR IMPROVED CONFORMALITY FOR LOW TE...

CARBON MASK DEPOSITION

IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY

SHOWERHEAD FACEPLATE CONFIGURATIONS

METHOD TO SMOOTH SIDEWALL ROUGHNESS AND MAINTAIN REENTRANT STRUCTUR...

METHOD FOR REDUCING VARIATIONS IN MASK TOPOGRAPHY

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

DEVELOPMENT OF HYBRID ORGANOTIN OXIDE PHOTORESISTS

IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...

AQUEOUS ACID DEVELOPMENT OR TREATMENT OF ORGANOMETALLIC PHOTORESIST

LARGE GRAIN TUNGSTEN GROWTH IN FEATURES

MULTI-ZONE COATINGS ON PARTS FOR GALLING PREVENTION AND HIGH-TEMPER...

Systems and Methods for Extracting Process Control Information from...

TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS

A WAFER CHUCK ASSEMBLY WITH THERMAL INSULATION FOR RF CONNECTIONS

CROSS FLOW CONDUIT FOR FOAMING PREVENTION IN HIGH CONVECTION PLATIN...

CONFORMAL DEPOSITION OF SILICON NITRIDE

MODEL-BASED SCHEDULING FOR SUBSTRATE PROCESSING SYSTEMS

SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...

DIRECT-PICK ROBOT FOR MULTI-STATION SEMICONDUCTOR PROCESSING CHAMBERS

A METHOD AND APPARATUS FOR ENHANCING ION ENERGY AND REDUCING ION EN...

PEDESTAL POLISHING APPARATUS

METHOD FOR PROVIDING DOPED SILICON USING A DIFFUSION BARRIER LAYER

WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...

VALVE SYSTEMS FOR BALANCING GAS FLOW TO MULTIPLE STATIONS OF A SUBS...

LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...

DEPOSITION OF HIGH COMPRESSIVE STRESS THERMALLY STABLE NITRIDE FILM

SUBSTRATE PROCESSING TOOL WITH RAPID AND SELECTIVE CONTROL OF PARTI...

Trademarklast 30 trademarks

99035656 - PRESTIS

99023170 - FABTEX

98846897 - DEXTRO

98689861 - ARTEMIS

98689843 - CRYO 3.0

98554818 - SELITANE

98467965 - LAM CRYO

98376855 - GALILEO

98150644 - TREOS

98150653 - TREOS