m . FSI LTD.

Organization

Tokyo, JP

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Regeneration process of etching solution, etching process, and etch...
- Patent number 7,238,295
- Issue date Jul 3, 2007
- m·FSI Ltd.
- Nobuhiko Izuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment process and apparatus
- Patent number 6,983,756
- Issue date Jan 10, 2006
- m·FSI Ltd.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus
- Patent number 6,874,516
- Issue date Apr 5, 2005
- m·FSI Ltd.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Grant
Wet cleaning process and wet cleaning equipment
- Patent number 6,866,723
- Issue date Mar 15, 2005
- m·FSI Ltd.
- Takeji Ueda
- B08 - CLEANING
Information Patent Grant
Slurry mixing feeder and slurry mixing and feeding method
- Patent number 6,767,124
- Issue date Jul 27, 2004
- m·FSI Ltd.
- Satoshi Shikami
- B24 - GRINDING POLISHING
Information Patent Grant
Supporting fixture of substrate and drying method of substrate surf...
- Patent number 6,722,055
- Issue date Apr 20, 2004
- m·FSI Ltd.
- Satoshi Shikami
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
Regeneration method of etching solution, an etching method and an e...
- Publication number 20080087645
- Publication date Apr 17, 2008
- m . FSI LTD.
- Nobuhiko Izuta
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Equipment and method for measuring silicon concentration in phospho...
- Publication number 20060263251
- Publication date Nov 23, 2006
- m-FSI LTD.
- Haruru Watatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cleaning apparatus
- Publication number 20050183749
- Publication date Aug 25, 2005
- m . FSI LTD.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Application
Substrate cleaning apparatus
- Publication number 20050183750
- Publication date Aug 25, 2005
- m . FSI LTD.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Application
Substrate cleaning apparatus
- Publication number 20050150530
- Publication date Jul 14, 2005
- m . FSI LTD.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Application
Regeneration process of etching solution, etching process, and etch...
- Publication number 20040200806
- Publication date Oct 14, 2004
- m . FSI LTD.
- Nobuhiko Izuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate treatment process and apparatus
- Publication number 20040194812
- Publication date Oct 7, 2004
- m . FSI LTD.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Application
Apparatus and method for preparing and supplying slurry for CMP mac...
- Publication number 20040049301
- Publication date Mar 11, 2004
- m . FSI LTD.
- Masato Kawasaki
- G05 - CONTROLLING REGULATING
Information Patent Application
Supporting fixture of substrate and drying method of substrate surf...
- Publication number 20030056391
- Publication date Mar 27, 2003
- m . FSI LTD.
- Satoshi Shikami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slurry mixing feeder and slurry mixing and feeding method
- Publication number 20030031086
- Publication date Feb 13, 2003
- m . FSI LTD.
- Satoshi Shikami
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Substrate Cleaning apparatus
- Publication number 20030005948
- Publication date Jan 9, 2003
- m . FSI LTD.
- Kousaku Matsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wet cleaning process and wet cleaning equipment
- Publication number 20020036006
- Publication date Mar 28, 2002
- m-FSI LTD.
- Takeji Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning process for substrate surface
- Publication number 20010053585
- Publication date Dec 20, 2001
- m-FSI LTD.
- Satoshi Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treatment process and apparatus
- Publication number 20010009155
- Publication date Jul 26, 2001
- m . FSI LTD.
- Kousaku Matsuno
- B08 - CLEANING

m . FSI LTD.

Organization

Patents Grantslast 30 patents

Regeneration process of etching solution, etching process, and etch...

Substrate treatment process and apparatus

Substrate cleaning apparatus

Wet cleaning process and wet cleaning equipment

Slurry mixing feeder and slurry mixing and feeding method

Supporting fixture of substrate and drying method of substrate surf...

Patents Applicationslast 30 patents

Regeneration method of etching solution, an etching method and an e...

Equipment and method for measuring silicon concentration in phospho...

Substrate cleaning apparatus

Substrate cleaning apparatus

Substrate cleaning apparatus

Regeneration process of etching solution, etching process, and etch...

Substrate treatment process and apparatus

Apparatus and method for preparing and supplying slurry for CMP mac...

Supporting fixture of substrate and drying method of substrate surf...

Slurry mixing feeder and slurry mixing and feeding method

Substrate Cleaning apparatus

Wet cleaning process and wet cleaning equipment

Cleaning process for substrate surface

Substrate treatment process and apparatus