TREA

M. Watanabe Co., Ltd.

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method and apparatus for cleaning photomask
    • Patent number 6,277,205
    • Issue date Aug 21, 2001
    • Mitsubishi Denki Kabushiki Kaisha
    • Yoshikazu Nagamura
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method and apparatus for cleaning photomask
    • Patent number 6,071,376
    • Issue date Jun 6, 2000
    • Mitsubishi Denki Kabushiki Kaisha
    • Yoshikazu Nagamura
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY