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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
10,324,385
Issue date
Jun 18, 2019
Mapper Lithography IP B.V.
Jerry Johannes Martinus Peijster
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle lithography system
Patent number
10,297,420
Issue date
May 21, 2019
Mapper Lithography IP B.V.
Teunis Van De Peut
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithography system, sensor, converter element and method of manufac...
Patent number
RE47287
Issue date
Mar 12, 2019
Mapper Lithography IP B.V.
Rabah Hanfoug
Information
Patent Grant
Enclosure for a target processing machine
Patent number
10,144,134
Issue date
Dec 4, 2018
Mapper Lithography IP B.V.
Joep Gerard Vijverberg
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Method and apparatus for aligning substrates on a substrate support...
Patent number
10,133,186
Issue date
Nov 20, 2018
Mapper Lithography IP B.V.
Bart Schipper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and encoding device for encoding a sequence of m-bit pattern...
Patent number
10,110,343
Issue date
Oct 23, 2018
Mapper Lithography IP B.V.
Marco Jan-Jaco Wieland
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Control system and method for lithography apparatus
Patent number
10,096,450
Issue date
Oct 9, 2018
Mapper Lithography IP B.V.
Herre Tjerk Steenstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Load lock system and method for transferring substrates in a lithog...
Patent number
10,087,019
Issue date
Oct 2, 2018
Mapper Lithography IP B.V.
Michel Pieter Dansberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabricating unique chips using a charged particle multi-beamlet lit...
Patent number
10,079,206
Issue date
Sep 18, 2018
Mapper Lithography IP B.V.
Marcel Nicolaas Jacobus van Kervinck
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and arrangement for handling and processing substrates
Patent number
10,078,274
Issue date
Sep 18, 2018
Mapper Lithography IP B.V.
Hendrik Jan De Jong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of determining a position of a substrate in a lithography sy...
Patent number
10,054,863
Issue date
Aug 21, 2018
Mapper Lithography IP B.V.
Guido De Boer
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Adjustment assembly and substrate exposure system comprising such a...
Patent number
10,048,599
Issue date
Aug 14, 2018
Mapper Lithography IP B.V.
Jerry Johannes Martinus Peijster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High voltage shielding and cooling in a charged particle beam gener...
Patent number
10,037,864
Issue date
Jul 31, 2018
Mapper Lithography IP B.V.
Alexander Hendrik Vincent Van Veen
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Optical fiber feedthrough device and fiber path arrangement
Patent number
10,008,362
Issue date
Jun 26, 2018
Mapper Lithography IP B.V.
Johannes Petrus Sprengers
G02 - OPTICS
Information
Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
9,981,293
Issue date
May 29, 2018
Mapper Lithography IP B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Method for exposing a wafer
Patent number
9,978,562
Issue date
May 22, 2018
Mapper Lithography IP B.V.
Teunis Van De Peut
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Target processing unit
Patent number
9,941,093
Issue date
Apr 10, 2018
Mapper Lithography IP B.V.
Johan Joost Koning
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Vacuum chamber with a thick aluminum base plate
Patent number
9,939,728
Issue date
Apr 10, 2018
Mapper Lithography IP B.V.
Jerry Johannes Martinus Peijster
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Beam grid layout
Patent number
9,934,943
Issue date
Apr 3, 2018
Mapper Lithography IP B.V.
Vincent Sylvester Kuiper
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drying apparatus for use in a lithography system
Patent number
9,922,801
Issue date
Mar 20, 2018
Mapper Lithography IP B.V.
Hendrik Jan de Jong
F26 - DRYING
Information
Patent Grant
Multi-electrode electron optics
Patent number
9,905,322
Issue date
Feb 27, 2018
Mapper Lithography IP B.V.
Marco Jan-Jaco Wieland
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and device for generating a decoded and synchronized output
Patent number
9,887,707
Issue date
Feb 6, 2018
Mapper Lithography IP B.V.
Marco Jan-Jaco Wieland
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Substrate holding device, method for manufacturing such a device, a...
Patent number
9,829,804
Issue date
Nov 28, 2017
Mapper Lithography IP B.V.
Paul Ijmert Scheffers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography system and method for processing a target, such as a wafer
Patent number
9,760,028
Issue date
Sep 12, 2017
Mapper Lithography IP B.V.
Niels Vergeer
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Substrate processing apparatus
Patent number
9,703,213
Issue date
Jul 11, 2017
Mapper Lithography IP B.V.
Jerry Johannes Martinus Peijster
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Dual pass scanning
Patent number
9,691,589
Issue date
Jun 27, 2017
Mapper Lithography IP B.V.
Teunis Van De Peut
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electrostatic lens structure
Patent number
RE46452
Issue date
Jun 27, 2017
Mapper Lithography IP B.V.
Stijn Willem Herman Karel Steenbrink
Information
Patent Grant
Interferometer module
Patent number
9,690,215
Issue date
Jun 27, 2017
Mapper Lithography IP B.V.
Guido de Boer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography system with differential interferometer module
Patent number
9,678,443
Issue date
Jun 13, 2017
Mapper Lithography IP B.V.
Guido de Boer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography system, method of clamping and wafer table
Patent number
9,665,013
Issue date
May 30, 2017
Mapper Lithography IP B.V.
Guido De Boer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR ALIGNING SUBSTRATES ON A SUBSTRATE SUPPORT...
Publication number
20190258173
Publication date
Aug 22, 2019
Mapper Lithography IP B.V.
Bart SCHIPPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING UNIQUE CHIPS USING A CHARGED PART...
Publication number
20190205495
Publication date
Jul 4, 2019
MAPPER LITHOGRAPHY IP BV
Marcel Nicolaas Jacobus van Kervinck
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM
Publication number
20180277334
Publication date
Sep 27, 2018
MAPPER LITHOGRAPHY IP BV
Alexander Hendrik Vincent VAN VEEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20180236505
Publication date
Aug 23, 2018
MAPPER LITHOGRAPHY IP BV
Marc Smits
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Adjustment assembly and substrate exposure system comprising such a...
Publication number
20180188659
Publication date
Jul 5, 2018
MAPPER LITHOGRAPHY IP BV
Jerry Johannes Martinus PEIJSTER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FEEDTHROUGH DEVICE AND SIGNAL CONDUCTOR PATH ARRANGEMENT
Publication number
20180182514
Publication date
Jun 28, 2018
MAPPER LITHOGRAPHY IP BV
Johannes Petrus Sprengers
G02 - OPTICS
Information
Patent Application
OPTICAL FIBER FEEDTHROUGH DEVICE AND FIBER PATH ARRANGEMENT
Publication number
20180182594
Publication date
Jun 28, 2018
MAPPER LITHOGRAPHY IP BV
Johannes Petrus Sprengers
G02 - OPTICS
Information
Patent Application
FABRICATING UNIQUE CHIPS USING A CHARGED PARTICLE MULTI-BEAMLET LI...
Publication number
20180122737
Publication date
May 3, 2018
MAPPER LITHOGRAPHY IP BV
Marcel Nicolaas Jacobus van Kervinck
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FABRICATING UNIQUE CHIPS USING A CHARGED PARTICLE MULTI-BEAMLET LI...
Publication number
20180120704
Publication date
May 3, 2018
MAPPER LITHOGRAPHY IP BV
Marcel Nicolaas Jacobus van Kervinck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ALIGNING SUBSTRATES ON A SUBSTRATE SUPPORT...
Publication number
20180113386
Publication date
Apr 26, 2018
MAPPER LITHOGRAPHY IP BV
Bart SCHIPPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING UNIQUE CHIPS USING A CHARGED PART...
Publication number
20180068047
Publication date
Mar 8, 2018
MAPPER LITHOGRAPHY IP BV
Marcel Nicolaas Jacobus van Kervinck
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SECURE CHIPS WITH SERIAL NUMBERS
Publication number
20180069710
Publication date
Mar 8, 2018
MAPPER LITHOGRAPHY IP BV
Johannes Cornelis Jacobus De Langen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SECURE CHIPS WITH SERIAL NUMBERS
Publication number
20180068955
Publication date
Mar 8, 2018
MAPPER LITHOGRAPHY IP BV
Johannes Cornelis Jacobus De Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE
Publication number
20180033586
Publication date
Feb 1, 2018
MAPPER LITHOGRAPHY IP BV
Paul IJmert SCHEFFERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR GENERATING A DECODED AND SYNCHRONIZED OUTPUT
Publication number
20180006668
Publication date
Jan 4, 2018
Mapper Lithography IP B.V.
Marco Jan-Jaco WIELAND
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Method and Encoding Device for Encoding a Sequence of M-Bit Pattern...
Publication number
20180006765
Publication date
Jan 4, 2018
MAPPER LITHOGRAPHY IP BV
Marco Jan-Jaco Wieland
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
ELECTROSTATIC LENS STRUCTURE
Publication number
20170309438
Publication date
Oct 26, 2017
MAPPER LITHOGRAPHY IP BV
Stijn Willem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR THE REMOVAL AND/OR AVOIDANCE OF CONTAMINATION...
Publication number
20170304878
Publication date
Oct 26, 2017
MAPPER LITHOGRAPHY IP BV
Marc Smits
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20170307987
Publication date
Oct 26, 2017
MAPPER LITHOGRAPHY IP BV
Jerry Johannes Martinus PEIJSTER
B82 - NANO-TECHNOLOGY
Information
Patent Application
LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE
Publication number
20170277043
Publication date
Sep 28, 2017
MAPPER LITHOGRAPHY IP BV
Guido de Boer
G01 - MEASURING TESTING
Information
Patent Application
High voltage shielding and cooling in a charged particle beam gener...
Publication number
20170250053
Publication date
Aug 31, 2017
MAPPER LITHOGRAPHY IP BV
Alexander Hendrik Vincent Van Veen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20170221674
Publication date
Aug 3, 2017
MAPPER LITHOGRAPHY IP BV
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
CONTROL SYSTEM AND METHOD FOR LITHOGRAPHY APPARATUS
Publication number
20170186582
Publication date
Jun 29, 2017
MAPPER LITHOGRAPHY IP BV
HERRE TJERK STEENSTRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND ARRANGEMENT FOR HANDLING AND PROCESSING SUBSTRATES
Publication number
20160370704
Publication date
Dec 22, 2016
MAPPER LITHOGRAPHY IP BV
Hendrik Jan DE JONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focusing electrode for cathode arrangement, electron gun, and litho...
Publication number
20160314935
Publication date
Oct 27, 2016
MAPPER LITHOGRAPHY IP BV
Laura DINU-GÜRTLER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Individual beam pattern placement verification in multiple beam lit...
Publication number
20160268099
Publication date
Sep 15, 2016
MAPPER LITHOGRAPHY IP BV
Niels VERGEER
G01 - MEASURING TESTING
Information
Patent Application
LOAD LOCK SYSTEM AND METHOD FOR TRANSFERRING SUBSTRATES IN A LITHOG...
Publication number
20160137427
Publication date
May 19, 2016
MAPPER LITHOGRAPHY IP BV
Michel Pieter Dansberg
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
TARGET PROCESSING UNIT
Publication number
20160126055
Publication date
May 5, 2016
MAPPER LITHOGRAPHY IP BV
Johan Joost Koning
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM GRID LAYOUT
Publication number
20160071696
Publication date
Mar 10, 2016
MAPPER LITHOGRAPHY IP BV
Vincent Sylvester KUIPER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cabinet for Electronic Equipment
Publication number
20160066478
Publication date
Mar 3, 2016
MAPPER LITHOGRAPHY IP BV
David Johannes VAN DEN BERGEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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