Mattson Thermal Products GmbH

Organization

Dornstadt, DE

Organizations

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for thermally treating semiconductor substrates
- Patent number 8,450,652
- Issue date May 28, 2013
- Mattson Thermal Products GmbH
- Manfred Falter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for determining the temperature of a semiconductor wafer in...
- Patent number 7,412,299
- Issue date Aug 12, 2008
- Mattson Thermal Products GmbH
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
Method of producing a calibration wafer
- Patent number 7,169,717
- Issue date Jan 30, 2007
- Mattson Thermal Products GmbH
- Christoph Merkl
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for thermally treating semiconductor wafers
- Patent number 7,151,060
- Issue date Dec 19, 2006
- Mattson Thermal Products GmbH
- Georg Roters
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for thermally treating a substrate that comprises several la...
- Patent number 7,144,747
- Issue date Dec 5, 2006
- Mattson Thermal Products GmbH
- Hin Yiu Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the production of process gas that include...
- Patent number 7,144,826
- Issue date Dec 5, 2006
- Mattson Thermal Products
- Georg Roters
- F22 - STEAM GENERATION
Information Patent Grant
Method and apparatus for thermally treating disk-shaped substrates
- Patent number 7,098,157
- Issue date Aug 29, 2006
- Mattson Thermal Products GmbH
- Klaus Funk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for thermal treatment of substrates
- Patent number 7,056,389
- Issue date Jun 6, 2006
- Mattson Thermal Products
- Markus Hauf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for thermally treating substrates
- Patent number 6,965,093
- Issue date Nov 15, 2005
- Mattson Thermal Products GmbH
- Manfred Falter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjusting of defect profiles in crystal or crystalline-like structures
- Patent number 6,809,011
- Issue date Oct 26, 2004
- Mattson Thermal Products GmbH
- Wilfried Lerch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for thermally treating objects
- Patent number 6,775,471
- Issue date Aug 10, 2004
- Mattson Thermal Products GmbH
- Werner Blersch
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
ENDEFFECTORS FOR HANDLING SEMICONDUCTOR WAFERS
- Publication number 20100096869
- Publication date Apr 22, 2010
- Mattson Thermal Products GmbH
- Paul Mantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR THE HEAT TREATMENT OF DISC SHAPED SUBSTRATES
- Publication number 20090217875
- Publication date Sep 3, 2009
- Mattson Thermal Products GmbH
- Waltraud Dietl
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
79036159 - ATMOS
- Serial number 79036159
- Registration number 3527674
- Filing date Dec 5, 2006
- Mattson Thermal Products GmbH
- 7 - Machines and machine tools
Information Trademark
79036160 - PEITOS
- Serial number 79036160
- Registration number 3537187
- Filing date Dec 5, 2006
- Mattson Thermal Products GmbH
- 7 - Machines and machine tools
Information Trademark
78232331 - HELIOS
- Serial number 78232331
- Registration number 3037494
- Filing date Apr 1, 2003
- Mattson Thermal Products GmbH
- 7 - Machines and machine tools

Mattson Thermal Products GmbH

Organization

Patents Grantslast 30 patents

Apparatus for thermally treating semiconductor substrates

Process for determining the temperature of a semiconductor wafer in...

Method of producing a calibration wafer

Device and method for thermally treating semiconductor wafers

Method for thermally treating a substrate that comprises several la...

Method and apparatus for the production of process gas that include...

Method and apparatus for thermally treating disk-shaped substrates

Method and device for thermal treatment of substrates

Device for thermally treating substrates

Adjusting of defect profiles in crystal or crystalline-like structures

Method and device for thermally treating objects

Patents Applicationslast 30 patents

ENDEFFECTORS FOR HANDLING SEMICONDUCTOR WAFERS

APPARATUS FOR THE HEAT TREATMENT OF DISC SHAPED SUBSTRATES

Trademarklast 30 trademarks

79036159 - ATMOS

79036160 - PEITOS

78232331 - HELIOS