MECHANICAL SOCIAL SYSTEMS FOUNDATION

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Patents Grantslast 30 patents

Information Patent Grant
Dry etching method
- Patent number 6,383,403
- Issue date May 7, 2002
- Japan as represented by the Director General of the Agency of Industrial Scie...
- Akira Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas composition for dry etching and process of dry etching
- Patent number 6,322,715
- Issue date Nov 27, 2001
- Japan as represented by Director General of the Agency of Industrial Science...
- Akira Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for discharging thermal decomposition residue containing car...
- Patent number 4,474,524
- Issue date Oct 2, 1984
- Kabushiki Kaisha Kobe Seiko Sho
- Shigezo Kawakami
- F27 - FURNACES KILNS OVENS RETORTS

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