MECS Corporation

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Bisai, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin substrate transferring apparatus
- Patent number 6,234,738
- Issue date May 22, 2001
- MECS Corporation
- Kazuo Kimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning apparatus for a semiconductor wafer
- Patent number 5,365,672
- Issue date Nov 22, 1994
- MECS Corporation
- Katsuhiko Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer positioning apparatus
- Patent number 5,054,991
- Issue date Oct 8, 1991
- MECS Corporation
- Katsuhiko Kato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Carrier system for silicon wafer
- Patent number 4,778,331
- Issue date Oct 18, 1988
- MECS Corporation
- Kazuo Kimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for positioning silicon wafer
- Patent number 4,770,600
- Issue date Sep 13, 1988
- MECS Corporation
- Susumu Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier system for clean room
- Patent number 4,735,548
- Issue date Apr 5, 1988
- MECS Corporation
- Kazuo Kimata
- H01 - BASIC ELECTRIC ELEMENTS