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MFG SEALING TECHNOLOGY CO., LTD.

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  • NEW TAIPEI CITY, TW
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  • Information Patent Application

    Barrier Seal for Electrostatic Chuck
    • Publication number 20160240421
    • Publication date Aug 18, 2016
    • MFG SEALING TECHNOLOGY CO., LTD.
    • Yo-Yu Chang
    • H01 - BASIC ELECTRIC ELEMENTS

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