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Patent Grant
Cost-effective single crystal multi-stake actuator and method of ma...
Patent number
9,673,374
Issue date
Jun 6, 2017
MICROFINE MATERIALS TECHNOLOGIES PTY LTD
Yuexue Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
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COST-EFFECTIVE SINGLE CRYSTAL MULTI-STAKE ACTUATOR AND METHOD OF MA...
Publication number
20140354116
Publication date
Dec 4, 2014
MICROFINE MATERIALS TECHNOLOGIES PTY LTD
Yuexue Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
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