Micronic Laser Systems AB

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Patents Grantslast 30 patents

Information Patent Grant
1.5D SLM for lithography
- Patent number 8,767,175
- Issue date Jul 1, 2014
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G02 - OPTICS
Information Patent Grant
Criss-cross writing strategy
- Patent number 8,767,185
- Issue date Jul 1, 2014
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device using rotating printing arm to project or view im...
- Patent number 8,755,590
- Issue date Jun 17, 2014
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Methods and device for laser processing
- Patent number 8,743,165
- Issue date Jun 3, 2014
- Micronic Laser Systems AB
- Torbjörn Sandström
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic printing system with placement corrections
- Patent number 8,570,613
- Issue date Oct 29, 2013
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G01 - MEASURING TESTING
Information Patent Grant
Rotor optics imaging method and system with variable dose during sweep
- Patent number 8,537,416
- Issue date Sep 17, 2013
- Micronic Laser Systems AB
- Torbjörn Sandström
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for merging multiple geometrical pixel images...
- Patent number 8,539,395
- Issue date Sep 17, 2013
- Micronic Laser Systems AB
- Lars Ivansen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
SLM device and method combining multiple mirrors for high-power del...
- Patent number 8,531,755
- Issue date Sep 10, 2013
- Micronic Laser Systems AB
- Torbjörn Sandström
- G02 - OPTICS
Information Patent Grant
Rotor imaging system and method with variable-rate pixel clock
- Patent number 8,472,089
- Issue date Jun 25, 2013
- Micronic Laser Systems
- Torbjorn Sandstrom
- G01 - MEASURING TESTING
Information Patent Grant
Methods and device for laser processing
- Patent number 8,466,945
- Issue date Jun 18, 2013
- Micronic Laser Systems
- Torbjörn Sandström
Information Patent Grant
Method and apparatus for quantification of illumination non-uniform...
- Patent number 8,456,613
- Issue date Jun 4, 2013
- Micronic Laser Systems
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device using rotating printing arm to project or view im...
- Patent number 8,442,302
- Issue date May 14, 2013
- Micronic Laser Systems
- Torbjörn Sandström
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Image reading and writing using a complex two-dimensional interlace...
- Patent number 8,351,020
- Issue date Jan 8, 2013
- Micronic Laser Systems
- Torbjorn Sandstrom
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Variable overlap method and device for stitching together lithograp...
- Patent number 8,312,393
- Issue date Nov 13, 2012
- Micronic Laser Systems AB
- Sten Lindau
- G01 - MEASURING TESTING
Information Patent Grant
SLM lithography: printing to below K1=.30 without previous OPC proc...
- Patent number 7,934,172
- Issue date Apr 26, 2011
- Micronic Laser Systems AB
- Igor Ivonin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Triangulating design data and encoding design intent for microlitho...
- Patent number 7,930,653
- Issue date Apr 19, 2011
- Micronic Laser Systems AB
- Lars Ivansen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-focus method of enhanced three-dimensional exposure of resist
- Patent number 7,923,182
- Issue date Apr 12, 2011
- Micronic Laser Systems AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for a multiple exposure beams lithography tool
- Patent number 7,919,218
- Issue date Apr 5, 2011
- Micronic Laser Systems AB
- Fredrik Sjostrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring the position of a mark in a deflector system
- Patent number 7,912,671
- Issue date Mar 22, 2011
- Micronic Laser Systems AB
- Lars Stiblert
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for correcting SLM stamp image imperfections
- Patent number 7,842,926
- Issue date Nov 30, 2010
- Micronic Laser Systems AB
- Martin Olsson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for optical determination of physical properties...
- Patent number 7,808,648
- Issue date Oct 5, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G01 - MEASURING TESTING
Information Patent Grant
Pattern generator
- Patent number 7,800,815
- Issue date Sep 21, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pattern generator
- Patent number 7,787,174
- Issue date Aug 31, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fourier plane analysis and refinement of SLM calibration
- Patent number 7,759,620
- Issue date Jul 20, 2010
- Micronic Laser Systems AB
- Jarek Luberek
- G02 - OPTICS
Information Patent Grant
Method for high precision printing of patterns
- Patent number 7,755,657
- Issue date Jul 13, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Graphics engine for high precision lithography
- Patent number 7,715,641
- Issue date May 11, 2010
- Micronic Laser Systems AB
- Martin Olsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern generator
- Patent number 7,710,634
- Issue date May 4, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Image enhancement for multiple exposure beams
- Patent number 7,709,165
- Issue date May 4, 2010
- Micronic Laser Systems AB
- Peter Ekberg
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pupil improvement of incoherent imaging systems for enhanced CD lin...
- Patent number 7,705,963
- Issue date Apr 27, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Backside lithography and backside immersion lithography
- Patent number 7,705,965
- Issue date Apr 27, 2010
- Micronic Laser Systems AB
- Per-Erik Gustafsson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION METHODS AND DEVICES FOR PARTIALLY COHERENT ILLUMINATION
- Publication number 20110216302
- Publication date Sep 8, 2011
- Micronic Laser Systems AB
- Jarek Luberek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Oversized micro-mechanical light modulator with redundant elements,...
- Publication number 20100225992
- Publication date Sep 9, 2010
- Micronic Laser Systems AB
- Per Askebjer
- G02 - OPTICS
Information Patent Application
Rotor Optics Imaging Method and System with Variable Dose During Sweep
- Publication number 20100225943
- Publication date Sep 9, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G01 - MEASURING TESTING
Information Patent Application
ROTOR IMAGING SYSTEM AND METHOD WITH VARIABLE-RATE PIXEL CLOCK
- Publication number 20100225979
- Publication date Sep 9, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G01 - MEASURING TESTING
Information Patent Application
Statistical Illuminator
- Publication number 20100225236
- Publication date Sep 9, 2010
- Micronic Laser Systems AB
- Jarek Luberek
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC PRINTING SYSTEM WITH PLACEMENT CORRECTIONS
- Publication number 20100225974
- Publication date Sep 9, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G01 - MEASURING TESTING
Information Patent Application
Variable Overlap Method and Device for Stitching Together Lithograp...
- Publication number 20100229146
- Publication date Sep 9, 2010
- Micronic Laser Systems AB
- Sten Lindau
- G01 - MEASURING TESTING
Information Patent Application
SLM Device and Method
- Publication number 20100208329
- Publication date Aug 19, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G02 - OPTICS
Information Patent Application
Method And Device Using Rotating Printing Arm To Project Or View Im...
- Publication number 20100142757
- Publication date Jun 10, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G02 - OPTICS
Information Patent Application
Cortesian coordinate measurement for rotating system
- Publication number 20100141966
- Publication date Jun 10, 2010
- Micronic Laser Systems AB
- Jonas Walther
- G01 - MEASURING TESTING
Information Patent Application
GRADIENT ASSISTED IMAGE RESAMPLING IN MICRO-LITHOGRAPHIC PRINTING
- Publication number 20100142838
- Publication date Jun 10, 2010
- Micronic Laser Systems AB
- Lars Ivansen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE READING AND WRITING USING A COMPLEX TWO-DIMENSIONAL INTERLACE...
- Publication number 20100127431
- Publication date May 27, 2010
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ITERATIVE COMPENSATION FOR NON-LINEAR EFFECTS IN THREE-DI...
- Publication number 20100099035
- Publication date Apr 22, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-FOCUS METHOD OF ENHANCED THREE-DIMENSIONAL EXPOSURE OF RESIST
- Publication number 20100099051
- Publication date Apr 22, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF COMPENSATION FOR BLEACHING OF RESIST DURING THREE-DIMENSI...
- Publication number 20100099034
- Publication date Apr 22, 2010
- Micronic Laser Systems AB
- Torbjörn Sandström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laser interferometer systems and methods with suppressed error and...
- Publication number 20100020331
- Publication date Jan 28, 2010
- Micronic Laser Systems AB
- Anders Svensson
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for overlay compensation between subsequently...
- Publication number 20090325088
- Publication date Dec 31, 2009
- Micronic Laser Systems AB
- Fredrik Sjöström
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spatial Light Modulator with Structured Mirror Surfaces
- Publication number 20090303571
- Publication date Dec 10, 2009
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G02 - OPTICS
Information Patent Application
Image Enhancement Technique
- Publication number 20090303452
- Publication date Dec 10, 2009
- Micronic Laser Systems AB
- Ulric Ljungblad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PROJECTION PRINTING
- Publication number 20090213354
- Publication date Aug 27, 2009
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and apparatuses for reducing mura effects in generated patt...
- Publication number 20090199152
- Publication date Aug 6, 2009
- Micronic Laser Systems AB
- Fredrik Sjostrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for a multiple exposure beams lithography tool
- Publication number 20090197188
- Publication date Aug 6, 2009
- Micronic Laser Systems AB
- Fredrik Sjostrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE ENHANCEMENT FOR MULTIPLE EXPOSURE BEAMS
- Publication number 20090170016
- Publication date Jul 2, 2009
- Micronic Laser Systems AB
- Peter Ekberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE FORMING METHOD AND APPARATUS
- Publication number 20090066926
- Publication date Mar 12, 2009
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MURA DETECTION AND METROLOGY
- Publication number 20090028423
- Publication date Jan 29, 2009
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FOURIER PLANE ANALYSIS AND REFINEMENT OF SLM CALIBRATION
- Publication number 20090008580
- Publication date Jan 8, 2009
- Micronic Laser Systems AB
- Jarek Luberek
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR QUANTIFICATION OF ILLUMINATION NON-UNIFORM...
- Publication number 20080316457
- Publication date Dec 25, 2008
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Triangulating Design Data and Encoding Design Intent for Microlitho...
- Publication number 20080260283
- Publication date Oct 23, 2008
- Micronic Laser Systems AB
- Lars Ivansen
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR DATA INTEGRITY CHECKING
- Publication number 20080244371
- Publication date Oct 2, 2008
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
DUAL LAYER WORKPIECE MASKING AND MANUFACTURING PROCESS
- Publication number 20080131821
- Publication date Jun 5, 2008
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Trademarklast 30 trademarks

Information Trademark
79058960 - PREXISION
- Serial number 79058960
- Registration number 3752406
- Filing date Apr 3, 2008
- Micronic Laser Systems AB
- 7 - Machines and machine tools
Information Trademark
76124781 - M MICRONIC LASER SYSTEMS
- Serial number 76124781
- Registration number 2629087
- Filing date Sep 7, 2000
- Micronic Laser Systems AB
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

Micronic Laser Systems AB

Organization

Patents Grantslast 30 patents

1.5D SLM for lithography

Criss-cross writing strategy

Method and device using rotating printing arm to project or view im...

Methods and device for laser processing

Lithographic printing system with placement corrections

Rotor optics imaging method and system with variable dose during sweep

Method and apparatus for merging multiple geometrical pixel images...

SLM device and method combining multiple mirrors for high-power del...

Rotor imaging system and method with variable-rate pixel clock

Methods and device for laser processing

Method and apparatus for quantification of illumination non-uniform...

Method and device using rotating printing arm to project or view im...

Image reading and writing using a complex two-dimensional interlace...

Variable overlap method and device for stitching together lithograp...

SLM lithography: printing to below K1=.30 without previous OPC proc...

Triangulating design data and encoding design intent for microlitho...

Multi-focus method of enhanced three-dimensional exposure of resist

Method for a multiple exposure beams lithography tool

Method for measuring the position of a mark in a deflector system

Method and device for correcting SLM stamp image imperfections

Method and device for optical determination of physical properties...

Pattern generator

Pattern generator

Fourier plane analysis and refinement of SLM calibration

Method for high precision printing of patterns

Graphics engine for high precision lithography

Pattern generator

Image enhancement for multiple exposure beams

Pupil improvement of incoherent imaging systems for enhanced CD lin...

Backside lithography and backside immersion lithography

Patents Applicationslast 30 patents

ILLUMINATION METHODS AND DEVICES FOR PARTIALLY COHERENT ILLUMINATION

Oversized micro-mechanical light modulator with redundant elements,...

Rotor Optics Imaging Method and System with Variable Dose During Sweep

ROTOR IMAGING SYSTEM AND METHOD WITH VARIABLE-RATE PIXEL CLOCK

Statistical Illuminator

LITHOGRAPHIC PRINTING SYSTEM WITH PLACEMENT CORRECTIONS

Variable Overlap Method and Device for Stitching Together Lithograp...

SLM Device and Method

Method And Device Using Rotating Printing Arm To Project Or View Im...

Cortesian coordinate measurement for rotating system

GRADIENT ASSISTED IMAGE RESAMPLING IN MICRO-LITHOGRAPHIC PRINTING

IMAGE READING AND WRITING USING A COMPLEX TWO-DIMENSIONAL INTERLACE...

METHOD OF ITERATIVE COMPENSATION FOR NON-LINEAR EFFECTS IN THREE-DI...

MULTI-FOCUS METHOD OF ENHANCED THREE-DIMENSIONAL EXPOSURE OF RESIST

METHOD OF COMPENSATION FOR BLEACHING OF RESIST DURING THREE-DIMENSI...

Laser interferometer systems and methods with suppressed error and...

Method and apparatus for overlay compensation between subsequently...

Spatial Light Modulator with Structured Mirror Surfaces

Image Enhancement Technique

METHOD AND APPARATUS FOR PROJECTION PRINTING

Methods and apparatuses for reducing mura effects in generated patt...

Method for a multiple exposure beams lithography tool

IMAGE ENHANCEMENT FOR MULTIPLE EXPOSURE BEAMS

IMAGE FORMING METHOD AND APPARATUS

METHOD AND APPARATUS FOR MURA DETECTION AND METROLOGY

FOURIER PLANE ANALYSIS AND REFINEMENT OF SLM CALIBRATION

METHOD AND APPARATUS FOR QUANTIFICATION OF ILLUMINATION NON-UNIFORM...

Triangulating Design Data and Encoding Design Intent for Microlitho...

METHOD AND DEVICE FOR DATA INTEGRITY CHECKING

DUAL LAYER WORKPIECE MASKING AND MANUFACTURING PROCESS

Trademarklast 30 trademarks

79058960 - PREXISION

76124781 - M MICRONIC LASER SYSTEMS