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Mask alignment apparatus
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Patent number 4,544,311
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Issue date Oct 1, 1985
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Micronix Partners
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Anwar Husain
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Alignment apparatus
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Patent number 4,525,852
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Issue date Jun 25, 1985
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Micronix Partners
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Lawrence M. Rosenberg
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Lithography system
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Patent number 4,516,253
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Issue date May 7, 1985
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Micronix Partners
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W. Thomas Novak
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Lithography system
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Patent number 4,514,858
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Issue date Apr 30, 1985
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Micronix Partners
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W. Thomas Novak
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR