TREA

Mitsu Engineering & Ship Building Co., Ltd.

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Organization

  • Tokyo, JP
Organizations

Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer holder
    • Patent number 6,474,987
    • Issue date Nov 5, 2002
    • Mitsubishi Materials Silicon Corporation
    • Tetsuya Nakai
    • C30 - CRYSTAL GROWTH