Mitsubishi ElectricCompany

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Phase-shifting photomask blank and method of manufacturing the same...
- Patent number 5,952,128
- Issue date Sep 14, 1999
- Ulvac Coating Corporation
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...