MueTec Automatisierta Mikroskopie und Messtechnik GmbH

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Munich, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for measuring feature widths on masks for the semiconduct...
- Patent number 7,375,792
- Issue date May 20, 2008
- Leica Microsystems Semiconductor GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING