MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESSTECKNIK GMBH

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Method for an automatic optical measuring of an OPC structure
- Patent number 7,460,962
- Issue date Dec 2, 2008
- Muetec Automatisierte Mikroskopie und Messtecknik GmbH
- Hans-Juergen Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

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