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Multi-Planar Technologies, Inc.
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for CMP having multi-pressure zone loading for im...
Patent number
6,966,822
Issue date
Nov 22, 2005
Multi-Planar Technologies, Inc.
Jiro Kajiwara
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and method having a retaini...
Patent number
6,893,327
Issue date
May 17, 2005
Multi-Planar Technologies, Inc.
Jiro Kajiwara
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry distributor for chemical mechanical polishing apparatus and...
Patent number
6,887,132
Issue date
May 3, 2005
Multi Planar Technologies Incorporated
Jiro Kajiwara
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for CMP head having multi-pressure annular zone s...
Patent number
6,623,343
Issue date
Sep 23, 2003
Multi-Planar Technologies, Inc.
Jiro Kajiwara
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for CMP having multi-pressure zone loading for im...
Patent number
6,558,232
Issue date
May 6, 2003
Multi-Planar Technologies, Inc.
Jiro Kajiwara
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and method having a rotatin...
Patent number
6,540,590
Issue date
Apr 1, 2003
Multi-Planar Technologies, Inc.
Jiro Kajiwara
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and method having a soft ba...
Patent number
6,527,625
Issue date
Mar 4, 2003
Multi-Planar Technologies, Inc.
Jiro Kajiwara
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer-polishing head and polishing apparatus having the same
Patent number
6,508,696
Issue date
Jan 21, 2003
Mitsubishi Materials Corporation
Tatsunori Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for pneumatic diaphragm CMP head having separate...
Patent number
6,506,105
Issue date
Jan 14, 2003
Multi-Planar Technologies, Inc.
Jiro Kajiwara
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Chemical mechanical polishing apparatus and method having a retaini...
Publication number
20020182867
Publication date
Dec 5, 2002
MULTI PLANAR TECHNOLOGIES, INC.
Jiro Kajiwara
B24 - GRINDING POLISHING
Trademark
last 30 trademarks
Information
Trademark
76098486 - MULTI PLANAR TECHNOLOGIES INC.
Serial number
76098486
Filing date
Jul 27, 2000
MULTI PLANAR TECHNOLOGIES INCORPORATED
7 - Machines and machine tools
Information
Trademark
76098487 - MPTI
Serial number
76098487
Filing date
Jul 27, 2000
MULTI PLANAR TECHNOLOGIES INCORPORATED
7 - Machines and machine tools