Multibeam Corporation

Organization

Santa Clara, CA, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Precision substrate material removal using miniature-column charged...
- Patent number 9,673,114
- Issue date Jun 6, 2017
- Multibeam Corporation
- David K. Lam
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Charged particle beam substrate inspection using both vector and ra...
- Patent number 9,620,332
- Issue date Apr 11, 2017
- Multibeam Corporation
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment and registration targets for multiple-column charged part...
- Patent number 9,595,419
- Issue date Mar 14, 2017
- Multibeam Corporation
- Kevin M. Monahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,556,521
- Issue date Jan 31, 2017
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment and registration targets for multiple-column charged part...
- Patent number 9,478,395
- Issue date Oct 25, 2016
- Multibeam Corporation
- Kevin M. Monahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam substrate inspection using both vector and ra...
- Patent number 9,466,463
- Issue date Oct 11, 2016
- Multibeam Corporation
- David K. Lam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision substrate material removal using miniature-column charged...
- Patent number 9,466,464
- Issue date Oct 11, 2016
- Multibeam Corporation
- David K. Lam
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,453,281
- Issue date Sep 27, 2016
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automatic optimization of etch process for accelerated yield ramp w...
- Patent number 9,207,539
- Issue date Dec 8, 2015
- Multibeam Corporation
- David K. Lam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Matched multiple charged particle beam systems for lithographic pat...
- Patent number 9,184,027
- Issue date Nov 10, 2015
- Multibeam Corporation
- David K. Lam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Matched multiple charged particle beam systems for lithographic pat...
- Patent number 8,999,627
- Issue date Apr 7, 2015
- Multibeam Corporation
- David K. Lam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic optimization of etch process for accelerated yield ramp w...
- Patent number 8,999,628
- Issue date Apr 7, 2015
- Multibeam Corporation
- David K. Lam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam deflection method with separate stage trackin...
- Patent number 8,384,048
- Issue date Feb 26, 2013
- Multibeam Corporation
- John C. Wiesner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle optics with azimuthally-varying third-order aberra...
- Patent number 8,242,457
- Issue date Aug 14, 2012
- Multibeam Corporation
- N. William Parker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Flat panel display substrate testing system
- Patent number 7,941,237
- Issue date May 10, 2011
- Multibeam Corporation
- N. William Parker
- G01 - MEASURING TESTING
Information Patent Grant
Variable-ratio double-deflection beam blanker
- Patent number 7,928,404
- Issue date Apr 19, 2011
- Multibeam Corporation
- N. William Parker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Detector optics for electron beam inspection system
- Patent number 6,777,675
- Issue date Aug 17, 2004
- Multibeam
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM AXIAL CALIBRATION
- Publication number 20240404783
- Publication date Dec 5, 2024
- Multibeam Corporation
- Jeffery Michael Dech
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEFLECTION METHOD WITH SEPARATE STAGE TRACKIN...
- Publication number 20130266894
- Publication date Oct 10, 2013
- Multibeam Corporation
- John C. Wiesner
- B82 - NANO-TECHNOLOGY

Trademarklast 30 trademarks

Information Trademark
98026087 - METAPOSER
- Serial number 98026087
- Filing date Jun 2, 2023
- Multibeam Corporation
- 7 - Machines and machine tools
Information Trademark
87119518 - PILOT
- Serial number 87119518
- Filing date Jul 28, 2016
- Multibeam Corporation
- 7 - Machines and machine tools
Information Trademark
87106170 - CHIPLOCK
- Serial number 87106170
- Filing date Jul 15, 2016
- Multibeam Corporation
- 7 - Machines and machine tools
Information Trademark
86909668 - KRYPTOBEAM
- Serial number 86909668
- Filing date Feb 16, 2016
- Multibeam Corporation
- 7 - Machines and machine tools

Multibeam Corporation

Organization

Patents Grantslast 30 patents

Precision substrate material removal using miniature-column charged...

Charged particle beam substrate inspection using both vector and ra...

Alignment and registration targets for multiple-column charged part...

Precision deposition using miniature-column charged particle beam a...

Alignment and registration targets for multiple-column charged part...

Charged particle beam substrate inspection using both vector and ra...

Precision substrate material removal using miniature-column charged...

Precision deposition using miniature-column charged particle beam a...

Automatic optimization of etch process for accelerated yield ramp w...

Matched multiple charged particle beam systems for lithographic pat...

Matched multiple charged particle beam systems for lithographic pat...

Automatic optimization of etch process for accelerated yield ramp w...

Charged particle beam deflection method with separate stage trackin...

Charged particle optics with azimuthally-varying third-order aberra...

Flat panel display substrate testing system

Variable-ratio double-deflection beam blanker

Detector optics for electron beam inspection system

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM AXIAL CALIBRATION

CHARGED PARTICLE BEAM DEFLECTION METHOD WITH SEPARATE STAGE TRACKIN...

Trademarklast 30 trademarks

98026087 - METAPOSER

87119518 - PILOT

87106170 - CHIPLOCK

86909668 - KRYPTOBEAM