Multibeam Systems, Inc.

Organization

Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Optics for generation of high current density patterned charged par...
- Patent number 7,786,454
- Issue date Aug 31, 2010
- Tokyo Electron Limited
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optics for generation of high current density patterned charged par...
- Patent number 7,462,848
- Issue date Dec 9, 2008
- Multibeam Systems, Inc.
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector optics for multiple electron beam test system
- Patent number 7,456,402
- Issue date Nov 25, 2008
- Multibeam Systems, Inc.
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for inspection and testing of flat panel displ...
- Patent number 7,435,956
- Issue date Oct 14, 2008
- Multibeam Systems, Inc.
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual detector optics for simultaneous collection of secondary and b...
- Patent number 7,227,142
- Issue date Jun 5, 2007
- Multibeam Systems, Inc.
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector optics for charged particle beam inspection system
- Patent number 7,122,795
- Issue date Oct 17, 2006
- Multibeam Systems, Inc.
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam multi-column electron beam inspection system
- Patent number 6,977,375
- Issue date Dec 20, 2005
- Multibeam Systems, Inc.
- Edward M. Yin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Multi-column charged particle optics assembly
- Patent number 6,943,351
- Issue date Sep 13, 2005
- Multibeam Systems, Inc.
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platform positioning system
- Patent number 6,872,958
- Issue date Mar 29, 2005
- Multibeam Systems, Inc.
- Gerry B. Andeen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam multi-column electron beam inspection system
- Patent number 6,844,550
- Issue date Jan 18, 2005
- Multibeam Systems, Inc.
- Edward M. Yin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Image processing system for multi-beam inspection
- Patent number 6,738,506
- Issue date May 18, 2004
- Multibeam Systems, Inc.
- S. Daniel Miller
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-beam multi-column electron beam inspection system
- Patent number 6,734,428
- Issue date May 11, 2004
- Multibeam Systems, Inc.
- N. William Parker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electron optics for multi-beam electron beam lithography tool
- Patent number 6,617,587
- Issue date Sep 9, 2003
- Multibeam Systems, Inc.
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flexural joint
- Patent number 6,471,435
- Issue date Oct 29, 2002
- Multibeam Systems, Inc.
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Precision stage
- Patent number 6,355,994
- Issue date Mar 12, 2002
- Multibeam Systems, Inc.
- Gerry B. Andeen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

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Patents Applicationslast 30 patents

Information Patent Application
OPTICS FOR GENERATION OF HIGH CURRENT DENSITY PATTERNED CHARGED PAR...
- Publication number 20090057577
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- N. William Parker
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED...
- Publication number 20090008579
- Publication date Jan 8, 2009
- TOKYO ELECTRON LIMITED
- Koji TAKEYA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron optics for multi-beam electron beam lithography tool
- Publication number 20040119021
- Publication date Jun 24, 2004
- Ion Diagnostics
- N. William Parker
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON OPTICS FOR MULTI-BEAM ELECTRON BEAM LITHOGRAPHY TOOL
- Publication number 20030085360
- Publication date May 8, 2003
- Multibeam Systems, Inc.
- N. William Parker
- B82 - NANO-TECHNOLOGY

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Trademarklast 30 trademarks

Information Trademark
77730733 - MEBIC
- Serial number 77730733
- Registration number 3805606
- Filing date May 6, 2009
- Multibeam Systems, Inc
- 7 - Machines and machine tools

Multibeam Systems, Inc.

Organization

Patents Grantslast 30 patents

Optics for generation of high current density patterned charged par...

Optics for generation of high current density patterned charged par...

Detector optics for multiple electron beam test system

Apparatus and method for inspection and testing of flat panel displ...

Dual detector optics for simultaneous collection of secondary and b...

Detector optics for charged particle beam inspection system

Multi-beam multi-column electron beam inspection system

Multi-column charged particle optics assembly

Platform positioning system

Multi-beam multi-column electron beam inspection system

Image processing system for multi-beam inspection

Multi-beam multi-column electron beam inspection system

Electron optics for multi-beam electron beam lithography tool

Flexural joint

Precision stage

Patents Applicationslast 30 patents

OPTICS FOR GENERATION OF HIGH CURRENT DENSITY PATTERNED CHARGED PAR...

ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED...

Electron optics for multi-beam electron beam lithography tool

ELECTRON OPTICS FOR MULTI-BEAM ELECTRON BEAM LITHOGRAPHY TOOL

Trademarklast 30 trademarks

77730733 - MEBIC