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Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
Publication number
20130154059
Publication date
Jun 20, 2013
NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOUND-TYPE THIN FILM, METHOD OF FORMING THE SAME, AND ELECTRONIC...
Publication number
20100139762
Publication date
Jun 10, 2010
NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
Tadahiro Ohmi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTERLAYER INSULATION FILM, INTERCONNECT STRUCTURE, AND METHODS OF...
Publication number
20100101834
Publication date
Apr 29, 2010
NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTING APPARATUS AND ION IMPLANTING METHOD
Publication number
20100025821
Publication date
Feb 4, 2010
NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWER PLATE AND MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSIN...
Publication number
20090311869
Publication date
Dec 17, 2009
TOKYO ELECTRON LIMITED
Masahiro Okesaku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...