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Billerica, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Balancing pressure to improve a fluid seal
Patent number
8,168,057
Issue date
May 1, 2012
NEXX Systems, Inc.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method and apparatus for fluid processing a workpiece
Patent number
8,038,856
Issue date
Oct 18, 2011
NEXX Systems, Inc.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Balancing pressure to improve a fluid seal
Patent number
7,727,366
Issue date
Jun 1, 2010
NEXX Systems, Inc.
Arthur Keigler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for fluid processing a workpiece
Patent number
7,722,747
Issue date
May 25, 2010
NEXX Systems, Inc.
Arthur Keigler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for fluid processing a workpiece
Patent number
7,445,697
Issue date
Nov 4, 2008
NEXX Systems, Inc.
Arthur Keigler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-thin wafer handling system
Patent number
7,100,954
Issue date
Sep 5, 2006
NEXX Systems, Inc.
Martin P. Klein
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT
Publication number
20130009415
Publication date
Jan 10, 2013
Nexx Systems, Inc.
Daniel Goodman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LOADER AND UNLOADER
Publication number
20130011222
Publication date
Jan 10, 2013
Nexx Systems, Inc.
Daniel Goodman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LOADER AND UNLOADER HAVING A BERNOULLI SUPPORT
Publication number
20130011225
Publication date
Jan 10, 2013
NEXX System, Inc.
Daniel Goodman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDER
Publication number
20120325275
Publication date
Dec 27, 2012
Nexx Systems, Inc.
Daniel Goodman
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SEED LAYER DEPOSITION IN MICROSCALE FEATURES
Publication number
20120152752
Publication date
Jun 21, 2012
Nexx Systems, Inc.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
Publication number
20120103799
Publication date
May 3, 2012
NEXX SYSTEMS INC.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SEED LAYER DEPOSITION IN MICROSCALE FEATURES
Publication number
20110240481
Publication date
Oct 6, 2011
Nexx Systems, Inc.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
Publication number
20110139627
Publication date
Jun 16, 2011
Nexx Systems, Inc.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Apparatus for thermal processing with micro-environment
Publication number
20110114623
Publication date
May 19, 2011
Nexx Systems, Inc.
Daniel Goodman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING PALLET WITH COOLING
Publication number
20110024964
Publication date
Feb 3, 2011
Nexx Systems, Inc.
Daniel Goodman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BALANCING PRESSURE TO IMPROVE A FLUID SEAL
Publication number
20100301564
Publication date
Dec 2, 2010
Nexx Systems, Inc.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
Publication number
20100295225
Publication date
Nov 25, 2010
NEXX SYSTEMS INC.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
WETTING A WORKPIECE SURFACE IN A FLUID-PROCESSING SYSTEM
Publication number
20100212694
Publication date
Aug 26, 2010
Nexx Systems, Inc.
Arthur Keigler
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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