NISSIN ION EQUIPMENT CO., LTD.

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Patents Grantslast 30 patents

Information Patent Grant
Vaporizer, ion source and method for generating aluminum-containing...
- Patent number 12,112,915
- Issue date Oct 8, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Sami K. Hahto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam irradiation apparatus and program therefor
- Patent number 11,955,311
- Issue date Apr 9, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Shinya Takemura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer supporting device
- Patent number 11,929,266
- Issue date Mar 12, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Takashi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding device
- Patent number 11,776,839
- Issue date Oct 3, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Ippei Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heating device
- Patent number 11,751,287
- Issue date Sep 5, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Masatoshi Onoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 11,749,501
- Issue date Sep 5, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Jian Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device
- Patent number 11,621,180
- Issue date Apr 4, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer separating apparatus, and wafer separating method
- Patent number 11,476,148
- Issue date Oct 18, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation apparatus and program therefor
- Patent number 11,462,385
- Issue date Oct 4, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Shinya Takemura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Ion beam extraction electrode
- Patent number D962168
- Issue date Aug 30, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Masamitsu Kawamura
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Mass separator using retractable magnetic yoke on a beam bending path
- Patent number 11,322,342
- Issue date May 3, 2022
- Nissin Ion Equipment Co., Ltd.
- Daiki Takashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam profile determination method and ion beam irradiation apparatus
- Patent number 11,145,486
- Issue date Oct 12, 2021
- NISSIN ION EQUIPMENT CO., LTD.
- Yutaka Inouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate accommodation device
- Patent number 11,127,616
- Issue date Sep 21, 2021
- NISSIN ION EQUIPMENT CO., LTD.
- Koyu Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 11,017,974
- Issue date May 25, 2021
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and cleaning method thereof
- Patent number 10,971,339
- Issue date Apr 6, 2021
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device and semiconductor manufacturing apparatus
- Patent number 10,916,457
- Issue date Feb 9, 2021
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation apparatus
- Patent number 10,784,075
- Issue date Sep 22, 2020
- Nissin ION Equipment Co., Ltd.
- Shinya Hisada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for neutralizing ion beam, and apparatus using the method
- Patent number 10,763,096
- Issue date Sep 1, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Yusuke Kuwata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source, ion beam irradiation apparatus, and operating method fo...
- Patent number 10,763,073
- Issue date Sep 1, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Tetsuro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation apparatus
- Patent number 10,714,302
- Issue date Jul 14, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Tetsuro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 10,600,608
- Issue date Mar 24, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and ion implantation apparatus
- Patent number 10,573,490
- Issue date Feb 25, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Tetsuro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source
- Patent number 10,470,284
- Issue date Nov 5, 2019
- NISSIN ION EQUIPMENT CO., LTD.
- Suguru Itoi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam current measuring device and charged particle beam irradiation...
- Patent number 10,222,400
- Issue date Mar 5, 2019
- NISSIN ION EQUIPMENT CO., LTD.
- Hideyasu Une
- G01 - MEASURING TESTING
Information Patent Grant
Plasma source
- Patent number 10,199,201
- Issue date Feb 5, 2019
- NISSIN ION EQUIPMENT CO., LTD.
- Hideki Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generation system
- Patent number 10,153,134
- Issue date Dec 11, 2018
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cooling semiconductor manufacturing apparatus and substr...
- Patent number 10,109,509
- Issue date Oct 23, 2018
- NISSIN ION EQUIPMENT CO., LTD.
- Kunifumi Takaoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation apparatus
- Patent number 10,002,751
- Issue date Jun 19, 2018
- NISSIN ION EQUIPMENT CO., LTD.
- Naoya Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator with at least one non-metallic component
- Patent number 9,865,422
- Issue date Jan 9, 2018
- Nissin Ion Equipment Co., Ltd.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing system, vacuum processing device, lubricating age...
- Patent number 9,784,317
- Issue date Oct 10, 2017
- NISSIN ION EQUIPMENT CO., LTD.
- Masatoshi Onoda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20240404787
- Publication date Dec 5, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE
- Publication number 20240383127
- Publication date Nov 21, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Masatoshi ONODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION METHOD AND ION BEAM IRRADIATION APPARATUS
- Publication number 20240331973
- Publication date Oct 3, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya UCHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SOURCE
- Publication number 20240331980
- Publication date Oct 3, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Honoka WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM EXTRACTION ELECTRODE, ION SOURCE AND EXTRACTION ELECTRODE...
- Publication number 20240290576
- Publication date Aug 29, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER, ION SOURCE, ION BEAM IRRADIATION APPARATUS, AND AN OPERA...
- Publication number 20240186101
- Publication date Jun 6, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING...
- Publication number 20240098869
- Publication date Mar 21, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- George SACCO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ION SOURCE AND OPERATING METHOD THEREOF
- Publication number 20240038499
- Publication date Feb 1, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuta IWANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM IRRADIATION APPARATUS AND METHOD
- Publication number 20240030004
- Publication date Jan 25, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuta IWANAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING...
- Publication number 20230326702
- Publication date Oct 12, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING DEVICE
- Publication number 20230140269
- Publication date May 4, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Yusuke Otsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN SUPPLY DEVICE, AND ION BEAM IRRADIATION APPARATUS EQUIPPED...
- Publication number 20230008178
- Publication date Jan 12, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION APPARATUS
- Publication number 20220359184
- Publication date Nov 10, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Hiroaki Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUPPORTING DEVICE
- Publication number 20220336237
- Publication date Oct 20, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Takashi SAKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION APPARATUS AND PROGRAM THEREFOR
- Publication number 20220301817
- Publication date Sep 22, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Shinya TAKEMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20220189736
- Publication date Jun 16, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Jian WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SEPARATING APPARATUS, AND WAFER SEPARATING METHOD
- Publication number 20210391202
- Publication date Dec 16, 2021
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu ADACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COOLING DEVICE
- Publication number 20210305072
- Publication date Sep 30, 2021
- NISSIN ION EQUIPMENT CO., LTD.
- Masatoshi ONODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BEAM PROFILE DETERMINATION METHOD AND ION BEAM IRRADIATION APPARATUS
- Publication number 20210035774
- Publication date Feb 4, 2021
- NISSIN ION EQUIPMENT CO., LTD.
- Yutaka Inouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEATING DEVICE
- Publication number 20200413493
- Publication date Dec 31, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Masatoshi ONODA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEATING DEVICE
- Publication number 20200350189
- Publication date Nov 5, 2020
- NISSIN ION EQUIPMENT CO, LTD
- Masakazu ADACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION APPARATUS AND PROGRAM THEREFOR
- Publication number 20200312616
- Publication date Oct 1, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Shinya TAKEMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MASS SEPARATOR
- Publication number 20200312651
- Publication date Oct 1, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Daiki Takashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Substrate Cooling
- Publication number 20200294819
- Publication date Sep 17, 2020
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ACCOMMODATION DEVICE
- Publication number 20200286763
- Publication date Sep 10, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Koyu Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE AND CLEANING METHOD THEREOF
- Publication number 20200279720
- Publication date Sep 3, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu ADACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE MEASUREMENT DEVICE AND AN APPARATUS HAVING SU...
- Publication number 20200219739
- Publication date Jul 9, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Ryosuke GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING DEVICE
- Publication number 20200211891
- Publication date Jul 2, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Ippei NISHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION APPARATUS
- Publication number 20200051776
- Publication date Feb 13, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Shinya HISADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION APPARATUS
- Publication number 20190371563
- Publication date Dec 5, 2019
- NISSIN ION EQUIPMENT CO., LTD.
- Tetsuro YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
98524117 - KYOKA
- Serial number 98524117
- Filing date Apr 29, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- 7 - Machines and machine tools
Information Trademark
86940696 - LUXION
- Serial number 86940696
- Registration number 5080924
- Filing date Mar 15, 2016
- Nissin Ion Equipment Co., Ltd.
- 7 - Machines and machine tools
Information Trademark
86481794 - BEYEX
- Serial number 86481794
- Registration number 4825611
- Filing date Dec 16, 2014
- Nissin Ion Equipment Co., Ltd.
- 7 - Machines and machine tools
Information Trademark
79076296 - IMPHEAT
- Serial number 79076296
- Registration number 3799819
- Filing date Oct 15, 2009
- NISSIN ION EQUIPMENT CO., LTD.
- 7 - Machines and machine tools
Information Trademark
76691958 - SHEETOR
- Serial number 76691958
- Registration number 3645309
- Filing date Aug 11, 2008
- NISSIN ION EQUIPMENT CO., LTD.
- 7 - Machines and machine tools
Information Trademark
76686635 - CLARIS
- Serial number 76686635
- Registration number 3589503
- Filing date Feb 7, 2008
- NISSIN ION EQUIPMENT CO., LTD.
- 7 - Machines and machine tools
Information Trademark
76671290 - NISSIN ION EQUIPMENT CO., LTD.
- Serial number 76671290
- Registration number 3337781
- Filing date Jan 11, 2007
- NISSIN ION EQUIPMENT CO., LTD.
- 7 - Machines and machine tools
Information Trademark
76670557 - EXCEED
- Serial number 76670557
- Registration number 3383750
- Filing date Dec 19, 2006
- NISSIN ION EQUIPMENT CO., LTD.
- 7 - Machines and machine tools
Information Trademark
76660940 - N
- Serial number 76660940
- Registration number 3300494
- Filing date Jun 1, 2006
- NISSIN ION EQUIPMENT CO., LTD.
- 7 - Machines and machine tools

NISSIN ION EQUIPMENT CO., LTD.

Organization

Patents Grantslast 30 patents

Vaporizer, ion source and method for generating aluminum-containing...

Ion beam irradiation apparatus and program therefor

Wafer supporting device

Substrate holding device

Substrate heating device

Ion implantation apparatus

Heating device

Wafer separating apparatus, and wafer separating method

Ion beam irradiation apparatus and program therefor

Ion beam extraction electrode

Mass separator using retractable magnetic yoke on a beam bending path

Beam profile determination method and ion beam irradiation apparatus

Substrate accommodation device

Ion source

Ion source and cleaning method thereof

Heating device and semiconductor manufacturing apparatus

Ion beam irradiation apparatus

Method for neutralizing ion beam, and apparatus using the method

Ion source, ion beam irradiation apparatus, and operating method fo...

Ion beam irradiation apparatus

Ion source

Ion source and ion implantation apparatus

Plasma source

Beam current measuring device and charged particle beam irradiation...

Plasma source

Plasma generation system

Method for cooling semiconductor manufacturing apparatus and substr...

Ion beam irradiation apparatus

Plasma generator with at least one non-metallic component

Vacuum processing system, vacuum processing device, lubricating age...

Patents Applicationslast 30 patents

ION IMPLANTER AND ION IMPLANTATION METHOD

SUBSTRATE TRANSFER DEVICE

ION BEAM IRRADIATION METHOD AND ION BEAM IRRADIATION APPARATUS

PLASMA SOURCE

ION BEAM EXTRACTION ELECTRODE, ION SOURCE AND EXTRACTION ELECTRODE...

VAPORIZER, ION SOURCE, ION BEAM IRRADIATION APPARATUS, AND AN OPERA...

VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING...

ION SOURCE AND OPERATING METHOD THEREOF

ION BEAM IRRADIATION APPARATUS AND METHOD

VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING...

SUBSTRATE HOLDING DEVICE

HYDROGEN SUPPLY DEVICE, AND ION BEAM IRRADIATION APPARATUS EQUIPPED...

ION BEAM IRRADIATION APPARATUS

WAFER SUPPORTING DEVICE

ION BEAM IRRADIATION APPARATUS AND PROGRAM THEREFOR

ION IMPLANTATION APPARATUS

WAFER SEPARATING APPARATUS, AND WAFER SEPARATING METHOD

SUBSTRATE COOLING DEVICE

BEAM PROFILE DETERMINATION METHOD AND ION BEAM IRRADIATION APPARATUS

SUBSTRATE HEATING DEVICE

HEATING DEVICE

ION BEAM IRRADIATION APPARATUS AND PROGRAM THEREFOR

MASS SEPARATOR

Systems and Methods for Substrate Cooling

SUBSTRATE ACCOMMODATION DEVICE

ION SOURCE AND CLEANING METHOD THEREOF

SUBSTRATE TEMPERATURE MEASUREMENT DEVICE AND AN APPARATUS HAVING SU...

SUBSTRATE HOLDING DEVICE

ION BEAM IRRADIATION APPARATUS

ION BEAM IRRADIATION APPARATUS

Trademarklast 30 trademarks

98524117 - KYOKA

86940696 - LUXION

86481794 - BEYEX

79076296 - IMPHEAT

76691958 - SHEETOR

76686635 - CLARIS

76671290 - NISSIN ION EQUIPMENT CO., LTD.

76670557 - EXCEED

76660940 - N