OC Oerlikon Balzers AF

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Application of HIPIMS to through silicon via metallization in three...
- Patent number 8,475,634
- Issue date Jul 2, 2013
- OC Oerlikon Balzers AF
- Jurgen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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