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Patents Grants
last 30 patents
Information
Patent Grant
Ion beam lithography
Patent number
4,985,634
Issue date
Jan 15, 1991
Oesterreichische Investitionskredit Aktiengesellschaft and Ionen Mikrofabrica...
Gerhard Stengl
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for image alignment in ion lithography
Patent number
4,967,088
Issue date
Oct 30, 1990
Oesterreichische Investitionskredit Aktiengesellschaft
Gerhard Stengl
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Apparatus and method for inspecting a mask
Patent number
4,958,074
Issue date
Sep 18, 1990
Oesterreichische Investitionskredit Aktiengesellschaft
Edward Wolf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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