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Disk cascade scrubber
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Patent number 6,625,835
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Issue date Sep 30, 2003
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Lam Research Corporation
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David T. Frost
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer cascade scrubber
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Patent number 6,588,043
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Issue date Jul 8, 2003
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Lam Research Corporation
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David T. Frost
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer cleaning apparatus
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Patent number 5,875,507
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Issue date Mar 2, 1999
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Oliver Design, Inc.
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Donald Edgar Stephens
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H01 - BASIC ELECTRIC ELEMENTS
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