Omicron Vakuumphysik GmbH

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Taunusstein, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical near-field probe and process for its manufacture
- Patent number 5,966,482
- Issue date Oct 12, 1999
- Institut fur Mikrotechnik Mainz GmbH
- Wilfried Noell
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Adjusting device for microscopic movements
- Patent number 5,237,238
- Issue date Aug 17, 1993
- Omicron Vakuumphysik GmbH
- Thomas Berghaus
- B82 - NANO-TECHNOLOGY

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