Optimetrix Corporation

Organization

Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Step-and-repeat projection alignment and exposure system with auxil...
- Patent number 4,597,664
- Issue date Jul 1, 1986
- Optimetrix Corporation
- Karl-Heinz Johannsmeier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Step-and-repeat projection alignment and exposure system
- Patent number 4,573,791
- Issue date Mar 4, 1986
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical focusing system
- Patent number 4,540,278
- Issue date Sep 10, 1985
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas bearing
- Patent number 4,496,194
- Issue date Jan 29, 1985
- Optimetrix Corporation
- Edward H. Phillips
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Step-and-repeat projection alignment and exposure system
- Patent number 4,473,293
- Issue date Sep 25, 1984
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Step-and-repeat projection alignment and exposure system with auxil...
- Patent number 4,452,526
- Issue date Jun 5, 1984
- Optimetrix Corporation
- Karl-Heinz Johannsmeier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On machine reticle inspection device
- Patent number 4,443,096
- Issue date Apr 17, 1984
- Optimetrix Corporation
- Karl-Heinz Johannsmeier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-Y Addressable workpiece positioner having an improved X-Y address...
- Patent number 4,442,388
- Issue date Apr 10, 1984
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-Y Addressable workpiece positioner and mask aligner using same
- Patent number 4,425,537
- Issue date Jan 10, 1984
- Optimetrix Corporation
- Edward H. Phillips
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Frontal illumination system for semiconductive wafers
- Patent number 4,422,755
- Issue date Dec 27, 1983
- Optimetrix Corporation
- Edward H. Phillips
- G02 - OPTICS
Information Patent Grant
Alignment and exposure system with an indicium of an axis of motion...
- Patent number 4,414,749
- Issue date Nov 15, 1983
- Optimetrix Corporation
- Karl-Heinz Johannsmeier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas bearing
- Patent number 4,413,864
- Issue date Nov 8, 1983
- Optimetrix Corporation
- Edward H. Phillips
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Friction drive
- Patent number 4,393,727
- Issue date Jul 19, 1983
- Optimetrix Corporation
- Edward H. Phillips
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Illumination system
- Patent number 4,389,701
- Issue date Jun 21, 1983
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical focusing system
- Patent number 4,383,757
- Issue date May 17, 1983
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shutter mechanism
- Patent number 4,355,272
- Issue date Oct 19, 1982
- Optimetrix Corporation
- Lawrence A. Wise
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shutter mechanism
- Patent number 4,350,428
- Issue date Sep 21, 1982
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Two-stage wafer prealignment system for an optical alignment and ex...
- Patent number 4,345,836
- Issue date Aug 24, 1982
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shock and vibration isolation system
- Patent number 4,336,917
- Issue date Jun 29, 1982
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position control circuit
- Patent number 4,330,752
- Issue date May 18, 1982
- Optimetrix Corporation
- Ruediger F. Rauskolb
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shock and vibration isolation system
- Patent number 4,328,941
- Issue date May 11, 1982
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometrically controlled stage with precisely orthogonal axes...
- Patent number 4,311,390
- Issue date Jan 19, 1982
- Optimetrix Corporation
- Edward H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Optimetrix Corporation

Organization

Patents Grantslast 30 patents

Step-and-repeat projection alignment and exposure system with auxil...

Step-and-repeat projection alignment and exposure system

Optical focusing system

Gas bearing

Step-and-repeat projection alignment and exposure system

Step-and-repeat projection alignment and exposure system with auxil...

On machine reticle inspection device

X-Y Addressable workpiece positioner having an improved X-Y address...

X-Y Addressable workpiece positioner and mask aligner using same

Frontal illumination system for semiconductive wafers

Alignment and exposure system with an indicium of an axis of motion...

Gas bearing

Friction drive

Illumination system

Optical focusing system

Shutter mechanism

Shutter mechanism

Two-stage wafer prealignment system for an optical alignment and ex...

Shock and vibration isolation system

Position control circuit

Shock and vibration isolation system

Interferometrically controlled stage with precisely orthogonal axes...