Osterreichische Akadernie der Wissenschaften (OAW)

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Information Patent Application
Method for producing a MEMS apparatus with a high aspect ratio, and...
- Publication number 20130147313
- Publication date Jun 13, 2013
- Tecnet Equity NO Technologiebeteiligungs-Invest GmbH
- Matthias Sachse
- B81 - MICRO-STRUCTURAL TECHNOLOGY

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