PARAM CORPORATION

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Organization

Akishima-shi, Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron gun device
- Patent number 11,295,925
- Issue date Apr 5, 2022
- Param Corporation
- Hiroshi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tubular permanent magnet used in a multi-electron beam device
- Patent number 9,418,815
- Issue date Aug 16, 2016
- Param Corporation
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron gun and electron beam device
- Patent number 9,070,527
- Issue date Jun 30, 2015
- Param Corporation
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithography device and lithographic method
- Patent number 8,878,143
- Issue date Nov 4, 2014
- Param Corporation
- Hiroshi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
ELECTRON GUN DEVICE
- Publication number 20220051866
- Publication date Feb 17, 2022
- PARAM CORPORATION
- Hiroshi YASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON LENS AND THE ELECTRON BEAM DEVICE
- Publication number 20140252245
- Publication date Sep 11, 2014
- PARAM CORPORATION
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON BEAM LITHOGRAPHY DEVICE AND LITHOGRAPHIC METHOD
- Publication number 20140231668
- Publication date Aug 21, 2014
- PARAM CORPORATION
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON GUN AND ELECTRON BEAM DEVICE
- Publication number 20140055025
- Publication date Feb 27, 2014
- PARAM CORPORATION
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON LENS AND THE ELECTRON BEAM DEVICE
- Publication number 20130134322
- Publication date May 30, 2013
- PARAM CORPORATION
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY