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PETER WOLTERS CMP-SYSTEME GMBH & CO. KG
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D-24768 RENDSBURG, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Loading and unloading station for a device for the processing of ci...
Patent number
6,866,468
Issue date
Mar 15, 2005
Peter-Wolters CMP-Systeme GmbH & Co. KG
Helge Möller
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and method for the chemical mechanical polishing of the s...
Patent number
6,780,083
Issue date
Aug 24, 2004
Peter-Wolters CMP-Systeme GmbH & Co. KG
Ulrich Ising
B24 - GRINDING POLISHING
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Patent Grant
Holder for flat workpieces, particularly semiconductor wafers
Patent number
6,767,276
Issue date
Jul 27, 2004
Peter-Wolters CMP-Systeme GmbH & Co. KG
Thomas Keller
B24 - GRINDING POLISHING
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last 30 patents
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