Peter Wolters CMP-Systeme GmbH & Co. KT

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Rendsburg, DE

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Holder for flat workpieces, particularly semiconductor wafers
- Patent number 6,709,323
- Issue date Mar 23, 2004
- Peter Wolters CMP-Systeme GmbH & Co. KT
- Thomas Keller
- B24 - GRINDING POLISHING

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