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Phase Shift Technology, Inc.
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Tucson, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Weighted least-square interferometric measurement of multiple surfaces
Patent number
6,885,461
Issue date
Apr 26, 2005
Phase Shift Technology, Inc.
Shouhong Tang
G01 - MEASURING TESTING
Information
Patent Grant
Non linear phase shift calibration for interferometric measurement...
Patent number
6,856,405
Issue date
Feb 15, 2005
Phase Shift Technology, Inc.
Shouhong Tang
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for measuring the shape and thickness variatio...
Patent number
6,847,458
Issue date
Jan 25, 2005
Phase Shift Technology, Inc.
Klaus Freischlad
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for holding and transporting thin opaque plates
Patent number
6,844,929
Issue date
Jan 18, 2005
Phase Shift Technology
Joe M. Glenn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interferometer light source
Patent number
6,061,133
Issue date
May 9, 2000
Phase Shift Technology
Klaus Freischlad
G01 - MEASURING TESTING
Information
Patent Grant
Extended-source low coherence interferometer for flatness testing
Patent number
5,737,081
Issue date
Apr 7, 1998
Phase Shift Technology, Inc.
Klaus R. Freischlad
G01 - MEASURING TESTING
Information
Patent Grant
Sheet flatness measurement system and method
Patent number
5,471,307
Issue date
Nov 28, 1995
Phase Shift Technology, Inc.
Chris L. Koliopoulos
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Measurement of the top surface of an object with/without transparen...
Publication number
20070008551
Publication date
Jan 11, 2007
Phase Shift Technology, Inc.
Shouhong Tang
G01 - MEASURING TESTING
Information
Patent Application
Compliant pad wafer chuck
Publication number
20060255819
Publication date
Nov 16, 2006
Phase Shift Technology, Inc.
Chris L. Koliopoulos
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for holding and transporting thin opaque plates
Publication number
20040201843
Publication date
Oct 14, 2004
Phase Shift Technology, Inc.
Joe M. Glenn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for measuring the shape and thickness variatio...
Publication number
20040184038
Publication date
Sep 23, 2004
Phase Shift Technology, Inc.
Klaus Freischlad
G01 - MEASURING TESTING
Information
Patent Application
Non linear phase shift calibration for interferometric measurement...
Publication number
20040174526
Publication date
Sep 9, 2004
Phase Shift Technology, Inc.
Shouhong Tang
G01 - MEASURING TESTING
Information
Patent Application
Weighted least-square interferometric measurement of multiple surfaces
Publication number
20040105097
Publication date
Jun 3, 2004
Phase Shift Technology
Shouhong Tang
G01 - MEASURING TESTING
Trademark
last 30 trademarks