Pivotal Systems Corporation

Organization

Pleasanton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Preloaded piezo actuator and gas valve employing the actuator
- Patent number 11,079,035
- Issue date Aug 3, 2021
- PIVOTAL SYSTEMS CORPORATION
- Timothy R. Brown
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and apparatus for gas flow control
- Patent number 10,401,202
- Issue date Sep 3, 2019
- PIVOTAL SYSTEMS CORPORATION
- Joseph R. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for gas flow control
- Patent number 9,983,595
- Issue date May 29, 2018
- PIVOTAL SYSTEMS CORPORATION
- Adam J. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for gas flow control
- Patent number 9,904,297
- Issue date Feb 27, 2018
- PIVOTAL SYSTEMS CORPORATION
- Adam J. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for gas flow control
- Patent number 9,523,435
- Issue date Dec 20, 2016
- PIVOTAL SYSTEMS CORPORATION
- Adam J. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Transient measurements of mass flow controllers
- Patent number 9,400,004
- Issue date Jul 26, 2016
- Pivotal Systems Corporation
- Joseph R. Monkowski
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Method and apparatus for in situ testing of gas flow controllers
- Patent number 8,857,456
- Issue date Oct 14, 2014
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for in situ testing of gas flow controllers
- Patent number 8,667,830
- Issue date Mar 11, 2014
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for the measurement of atmospheric leaks in th...
- Patent number 8,393,197
- Issue date Mar 12, 2013
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for enhancing in-situ gas flow measurement per...
- Patent number 8,271,211
- Issue date Sep 18, 2012
- Pivotal Systems Corporation
- Sherk Chung
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for enhancing in-situ gas flow measurement per...
- Patent number 8,271,210
- Issue date Sep 18, 2012
- Pivotal Systems Corporation
- Sherk Chung
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for enhancing in-situ gas flow measurement per...
- Patent number 8,265,888
- Issue date Sep 11, 2012
- Pivotal Systems Corporation
- Sherk Chung
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for in situ testing of gas flow controllers
- Patent number 8,240,324
- Issue date Aug 14, 2012
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for identifying the chemical composition of a gas
- Patent number 8,237,928
- Issue date Aug 7, 2012
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
High-speed SECS message services (HSMS) pass-through including bypass
- Patent number 8,102,844
- Issue date Jan 24, 2012
- Pivotal Systems Corporation
- Andrew Bryan Nelson
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and apparatus for identifying the chemical composition of a gas
- Patent number 7,940,395
- Issue date May 10, 2011
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Data timestamp management
- Patent number 7,937,232
- Issue date May 3, 2011
- Pivotal Systems Corporation
- Paxton Ming Kai Chow
- G05 - CONTROLLING REGULATING
Information Patent Grant
End point detection method for plasma etching of semiconductor wafe...
- Patent number 7,871,830
- Issue date Jan 18, 2011
- Pivotal Systems Corporation
- Sumer S. Johal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controlling process end-point utilizing legac...
- Patent number 7,873,052
- Issue date Jan 18, 2011
- Pivotal Systems Corporation
- Sherk Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for in situ testing of gas flow controllers
- Patent number 7,823,436
- Issue date Nov 2, 2010
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Techniques for calibration of gas flows
- Patent number 7,757,541
- Issue date Jul 20, 2010
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Use of modeled parameters for real-time semiconductor process metro...
- Patent number 7,695,984
- Issue date Apr 13, 2010
- Pivotal Systems Corporation
- Joseph R Monkowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for vacuum chamber leak detection
- Patent number 7,590,498
- Issue date Sep 15, 2009
- Pivotal Systems Corporation
- Sherk Chung
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CONTROLLED SPLITTING OF FLUID FLOWS
- Publication number 20240385632
- Publication date Nov 21, 2024
- PIVOTAL SYSTEMS CORPORATION
- Joseph R. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Application
PRELOADED PIEZO ACTUATOR AND GAS VALVE EMPLOYING THE ACTUATOR
- Publication number 20210010608
- Publication date Jan 14, 2021
- PIVOTAL SYSTEMS CORPORATION
- Timothy R. Brown
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD AND APPARATUS FOR GAS FLOW CONTROL
- Publication number 20170052546
- Publication date Feb 23, 2017
- PIVOTAL SYSTEMS CORPORATION
- Adam J. Monkowski
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD AND APPARATUS FOR GAS FLOW CONTROL
- Publication number 20170010625
- Publication date Jan 12, 2017
- PIVOTAL SYSTEMS CORPORATION
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
Mass Flow Controller with Multiple Communication Protocols
- Publication number 20160161953
- Publication date Jun 9, 2016
- PIVOTAL SYSTEMS CORPORATION
- Joseph Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
- Publication number 20120304781
- Publication date Dec 6, 2012
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
TRANSIENT MEASUREMENTS OF MASS FLOW CONTROLLERS
- Publication number 20120132291
- Publication date May 31, 2012
- Pivotal Systems Corporation
- Joseph R. MONKOWSKI
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
- Publication number 20110177625
- Publication date Jul 21, 2011
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...
- Publication number 20110137583
- Publication date Jun 9, 2011
- Pivotal Systems Corporation
- Sherk CHUNG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...
- Publication number 20110137582
- Publication date Jun 9, 2011
- Pivotal Systems Corporation
- Sherk CHUNG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...
- Publication number 20110137581
- Publication date Jun 9, 2011
- Pivotal Systems Corporation
- Sherk CHUNG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR GAS FLOW CONTROL
- Publication number 20110108126
- Publication date May 12, 2011
- Pivotal Systems Corporation
- Adam J. MONKOWSKI
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
- Publication number 20110011183
- Publication date Jan 20, 2011
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR THE MEASUREMENT OF ATMOSPHERIC LEAKS IN TH...
- Publication number 20100018293
- Publication date Jan 28, 2010
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
- Publication number 20090183548
- Publication date Jul 23, 2009
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
- Publication number 20090183549
- Publication date Jul 23, 2009
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
- Publication number 20090180113
- Publication date Jul 16, 2009
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
System and method for controlling process end-point utilizing legac...
- Publication number 20080253377
- Publication date Oct 16, 2008
- Pivotal Systems Corporation
- Sherk Chung
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
87908427 - OMEGA 3.0
- Serial number 87908427
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87908462 - SQUARE WAVE FLOW CONTROL
- Serial number 87908462
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
87908440 - REAL-TIME FLOW MONITORING
- Serial number 87908440
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
87908340 - PIVOTAL SYSTEMS
- Serial number 87908340
- Registration number 5810272
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87908415 - GFM
- Serial number 87908415
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
87908452 - SENSOR X
- Serial number 87908452
- Registration number 6130805
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87907622 - PIVOTAL SYSTEMS
- Serial number 87907622
- Registration number 5810270
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87908447 - REAL-TIME FLOW MONITORING AND CONTROL
- Serial number 87908447
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
87908395 - END POINT INDEX GENERATOR
- Serial number 87908395
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87908371 - ACD
- Serial number 87908371
- Filing date May 4, 2018
- Pivotal Systems Corporation
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes

Pivotal Systems Corporation

Organization

Patents Grantslast 30 patents

Preloaded piezo actuator and gas valve employing the actuator

Method and apparatus for gas flow control

Method and apparatus for gas flow control

Method and apparatus for gas flow control

Method and apparatus for gas flow control

Transient measurements of mass flow controllers

Method and apparatus for in situ testing of gas flow controllers

Method and apparatus for in situ testing of gas flow controllers

Method and apparatus for the measurement of atmospheric leaks in th...

Method and apparatus for enhancing in-situ gas flow measurement per...

Method and apparatus for enhancing in-situ gas flow measurement per...

Method and apparatus for enhancing in-situ gas flow measurement per...

Method and apparatus for in situ testing of gas flow controllers

Method and apparatus for identifying the chemical composition of a gas

High-speed SECS message services (HSMS) pass-through including bypass

Method and apparatus for identifying the chemical composition of a gas

Data timestamp management

End point detection method for plasma etching of semiconductor wafe...

System and method for controlling process end-point utilizing legac...

Method and apparatus for in situ testing of gas flow controllers

Techniques for calibration of gas flows

Use of modeled parameters for real-time semiconductor process metro...

System and method for vacuum chamber leak detection

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CONTROLLED SPLITTING OF FLUID FLOWS

PRELOADED PIEZO ACTUATOR AND GAS VALVE EMPLOYING THE ACTUATOR

METHOD AND APPARATUS FOR GAS FLOW CONTROL

METHOD AND APPARATUS FOR GAS FLOW CONTROL

Mass Flow Controller with Multiple Communication Protocols

METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS

TRANSIENT MEASUREMENTS OF MASS FLOW CONTROLLERS

METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS

METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...

METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...

METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...

METHOD AND APPARATUS FOR GAS FLOW CONTROL

METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS

METHOD AND APPARATUS FOR THE MEASUREMENT OF ATMOSPHERIC LEAKS IN TH...

METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS

METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS

METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS

System and method for controlling process end-point utilizing legac...

Trademarklast 30 trademarks

87908427 - OMEGA 3.0

87908462 - SQUARE WAVE FLOW CONTROL

87908440 - REAL-TIME FLOW MONITORING

87908340 - PIVOTAL SYSTEMS

87908415 - GFM

87908452 - SENSOR X

87907622 - PIVOTAL SYSTEMS

87908447 - REAL-TIME FLOW MONITORING AND CONTROL

87908395 - END POINT INDEX GENERATOR

87908371 - ACD