Pre-Tech Co., Ltd.

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for cleaning a precision substrate
- Patent number 6,050,276
- Issue date Apr 18, 2000
- Pre-Tech Co., Ltd.
- Yasuyuki Harada
- B08 - CLEANING
Information Patent Grant
Cleaning solution and cleaning method
- Patent number 5,985,811
- Issue date Nov 16, 1999
- Ohmi; Tadhiro
- Toda Masayuki
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Cleaning apparatus
- Patent number 5,927,305
- Issue date Jul 27, 1999
- Pre-Tech Co., Ltd.
- Kazuhiko Shiba
- B08 - CLEANING
Information Patent Grant
Apparatus and method for cleaning semiconductor wafers
- Patent number 5,733,434
- Issue date Mar 31, 1998
- Pre-Tech Co., Ltd.
- Yasuyuki Harada
- B08 - CLEANING
Information Patent Grant
Apparatus and method for cleaning semiconductor wafers
- Patent number 5,725,753
- Issue date Mar 10, 1998
- Pre-Tech Co., Ltd.
- Yasuyuki Harada
- B08 - CLEANING
Information Patent Grant
Apparatus for cleaning silicon wafer
- Patent number 5,186,192
- Issue date Feb 16, 1993
- Shin-Etsu Handotai Co., Ltd.
- Shigeyoshi Netsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

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