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Proteros, LLC
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Danvers, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Ion implantation uniformity correction using beam current control
Patent number
6,661,016
Issue date
Dec 9, 2003
Proteros, LLC
Donald W. Berrian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compact load lock system for ion beam processing of foups
Patent number
6,428,262
Issue date
Aug 6, 2002
Proteros, LLC
John W. Vanderpot
H01 - BASIC ELECTRIC ELEMENTS