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Patents Grants
last 30 patents
Patents Applications
last 30 patents
Information
Patent Application
Tool for cleaning particles from wafer stage
Publication number
20060048333
Publication date
Mar 9, 2006
PSC Powerchip Semiconductor Corp.
Hung-Chi Wang
B08 - CLEANING
Information
Patent Application
Apparatus and method for monitoring a process of wet cleaning
Publication number
20060032517
Publication date
Feb 16, 2006
PSC Powerchip Semiconductor Corp.
Chen Kvan-Ming
B08 - CLEANING
Information
Patent Application
Method for cleaning the surface of an electrostatic chuck
Publication number
20050205417
Publication date
Sep 22, 2005
PSC Powerchip Semiconductor Corp.
Chi-Yun Chang
B08 - CLEANING
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